Copper wetting of two-dimensional silicates: Robust barriers for interconnect applications

Proceedings of the IEEE 2001 International Interconnect Technology Conference, IITC 2001

Volumn , Issue , 2001, Pages 6-8

  Zhao, X ^a   Leavy, M ^a   Magtoto, N ^a   Kelber, J A ^a  

^a UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85001139589     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.2001.930000     Document Type: Conference Paper

References (9)

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9. X. Zhao, M. Leavy, N. P. Magtoto and J. A. Kelber, in preparation