Ultrathin, transferred layers of thermally grown silicon dioxide as biofluid barriers for biointegrated flexible electronic systems

Proceedings of the National Academy of Sciences of the United States of America

Volumn 113, Issue 42, 2016, Pages 11682-11687

  Fang, Hui ^a   Zhao, Jianing ^a,b   Yu, Ki Jun ^a   Song, Enming ^a,c   Farimani, Amir Barati ^b,g   Chiang, Chia Han ^d   Jin, Xin ^e   Xue, Yeguang ^f   Xu, Dong ^a   Du, Wenbo ^a   Seo, Kyung Jin ^a   Zhong, Yiding ^a   Yang, Zijian ^a   Won, Sang Min ^a   Fang, Guanhua ^a   Choi, Seo Woo ^a   Chaudhuri, Santanu ^a   Huang, Yonggang ^f   Alam, Muhammad Ashraful ^e   Viventi, Jonathan ^d   Aluru, N R ^b   Rogers, John A ^a   more..

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c FUDAN UNIVERSITY   (China)

^d Duke University   (United States)

^e PURDUE UNIVERSITY   (United States)

^f Northwestern University   (United States)

^g STANFORD UNIVERSITY   (United States)

Author keywords

Chronic implant; Reactive molecular simulation; Thermal silicon dioxide; Thin film encapsulation; Transfer printing

Indexed keywords

POLYMER; SILICON DIOXIDE;

ARTICLE; BIOENGINEERING; BIOTECHNOLOGICAL PROCEDURES; CHEMICAL REACTION KINETICS; CHEMICAL STRUCTURE; DEGRADATION; DEVICE MATERIAL; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; HIGH TEMPERATURE; MATERIAL STATE; MOLECULAR DYNAMICS; OXIDATION; PERMEABILITY BARRIER; PHYSICAL CHEMISTRY; PHYSICAL PARAMETERS; PHYSICAL PHASE; PRIORITY JOURNAL; TEMPERATURE; BODY FLUID; CHEMISTRY; COMPUTER SIMULATION; ELECTRICITY; MEDICAL ELECTRONICS; THEORETICAL MODEL;

BODY FLUIDS; COMPUTER SIMULATION; ELECTRICITY; ELECTRONICS, MEDICAL; MODELS, THEORETICAL; SILICON DIOXIDE; TEMPERATURE;

EID: 84991666709     PISSN: 00278424     EISSN: 10916490     Source Type: Journal    
DOI: 10.1073/pnas.1605269113     Document Type: Article

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