Inorganic Materials Integrated Optics

AIP Conference Proceedings

Volumn 709, Issue , 2004, Pages 268-289

  Mueller, Joerg ^a   Mahnke, Matthias ^a   Schoer, Gerrit ^a   Wiechmann, Stefan ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE MATERIALS; DEPOSITION; ELECTRON OPTICS; FILMS; OPTICAL PROPERTIES; PLASMA ETCHING; QUANTUM ELECTRONICS; RESONATORS; VLSI CIRCUITS; WAVEGUIDE COMPONENTS; WAVEGUIDES;

ANISOTROPIC PLASMA ETCHING; CRYSTAL MORPHOLOGIES; DEPOSITION PARAMETERS; HIGH REFRACTIVE INDEX; INORGANIC MATERIALS; INTEGRATED OPTICAL CIRCUIT; MATERIAL COMPOSITIONS; WAVEGUIDE MATERIALS;

REFRACTIVE INDEX;

EID: 84984538304     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1764024     Document Type: Conference Paper

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