High Q broadband copper spiral inductors with Q=45 on proton-bombarded semi-insulating silicon substrate

2002 IEEE Asia-Pacific Conference on ASIC, AP-ASIC 2002 - Proceedings

Volumn , Issue , 2002, Pages 113-116

  Hsu, Heng Ming ^a   Su, Jiong Guang ^a   Lin, Yo Sheng ^a   Tseng, Ming Hao ^a   Lin, Jason Chih Hsien ^a   Sun, Jack Yuan Chen ^a   Tang, Denny ^a   Yang, Tsing Tyan ^b   Tu, Ting Sien ^b   Lin, Li Fu ^b  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

^b INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRIC INDUCTORS; EQUIVALENT CIRCUITS; FREQUENCY BANDS; Q FACTOR MEASUREMENT;

HIGH ENERGY PROTON; Q-FACTORS; SEMI-INSULATING; SILICON SUBSTRATES; SINGLE LAYER; SPIRAL INDUCTOR; SUBSTRATE RESISTIVITY;

SUBSTRATES;

EID: 84966263495     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APASIC.2002.1031545     Document Type: Conference Paper

References (9)

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