메뉴 건너뛰기




Volumn 2, Issue , 2002, Pages 839-843

Identification of wafer defect clusters using a self-organizing multilayer perceptron

Author keywords

[No Author keywords available]

Indexed keywords

ARTIFICIAL INTELLIGENCE; INFORMATION SCIENCE; MULTILAYERS; TESTING;

EID: 84964556396     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICONIP.2002.1198177     Document Type: Conference Paper
Times cited : (1)

References (9)
  • 1
    • 0034245675 scopus 로고    scopus 로고
    • A Neural-Network Approach to Recognize Defect Spatial Pattern in Semiconductor Fabrication
    • Aug.
    • F.-L. Chen, and S.-F. Liu, "A Neural-Network Approach to Recognize Defect Spatial Pattern in Semiconductor Fabrication," IEEE Transactions on Semiconductor Manufacturing, vol. 13, no. 3, Aug. 2000, pp. 366-373.
    • (2000) IEEE Transactions on Semiconductor Manufacturing , vol.13 , Issue.3 , pp. 366-373
    • Chen, F.-L.1    Liu, S.-F.2
  • 2
    • 0032206565 scopus 로고    scopus 로고
    • Automatic Defect Classification in Visual Inspection of Semiconductors Using Neural Networks
    • Nov.
    • K. Kameyama, Y. Kosugi, T. Okahashi, and M. Izumita, "Automatic Defect Classification in Visual Inspection of Semiconductors Using Neural Networks," IEICE Transactions on Information & Systems, vol. E81-D, no. 11, Nov. 1998, pp. 1261-1271.
    • (1998) IEICE Transactions on Information & Systems , vol.E81-D , Issue.11 , pp. 1261-1271
    • Kameyama, K.1    Kosugi, Y.2    Okahashi, T.3    Izumita, M.4
  • 3
    • 84975595283 scopus 로고
    • Patterned Wafer Inspection Using Spatial Filtering for Cluster Environment
    • June
    • M. Taubenlatt and J. Batchelder, "Patterned Wafer Inspection Using Spatial Filtering for Cluster Environment," Applied Optics, vol. 31, no. 17, June 1992, pp. 3354-3362.
    • (1992) Applied Optics , vol.31 , Issue.17 , pp. 3354-3362
    • Taubenlatt, M.1    Batchelder, J.2
  • 4
    • 0031271325 scopus 로고    scopus 로고
    • Defect Detection Algorithm for Wafer Inspection Based on Laser Scanning
    • May
    • M. Nikoonahad, C. Wayman, and S. Biellak, "Defect Detection Algorithm for Wafer Inspection Based on Laser Scanning," IEEE Transactions on Semiconductor Manufacturing, vol. 10, no. 4, May 1997, pp. 459-468.
    • (1997) IEEE Transactions on Semiconductor Manufacturing , vol.10 , Issue.4 , pp. 459-468
    • Nikoonahad, M.1    Wayman, C.2    Biellak, S.3
  • 5
    • 33746369502 scopus 로고    scopus 로고
    • Automatic Defect Pattern Detection on LSI Wafers Using Image Processing Techniques
    • June
    • K. Maruo, T. Shibata, T. Yamaguchi, M. Ichikawa, and T. Ohmi, "Automatic Defect Pattern Detection on LSI Wafers Using Image Processing Techniques," IEICE Transactions on Electronics, vol. E82-C, no. 6, June. 1999, pp. 1003-1012.
    • (1999) IEICE Transactions on Electronics , vol.E82-C , Issue.6 , pp. 1003-1012
    • Maruo, K.1    Shibata, T.2    Yamaguchi, T.3    Ichikawa, M.4    Ohmi, T.5
  • 6
    • 0036494840 scopus 로고    scopus 로고
    • Image Processing Techniques for Wafer Defect Cluster Identification
    • Mar.-Apr.
    • C.-J. Huang, C.-C. Wang, C.-F. Wu, "Image Processing Techniques for Wafer Defect Cluster Identification," IEEE Design & Test of Computers, vol. 19, no. 2, Mar.-Apr. 2002, pp. 44-48.
    • (2002) IEEE Design & Test of Computers , vol.19 , Issue.2 , pp. 44-48
    • Huang, C.-J.1    Wang, C.-C.2    Wu, C.-F.3
  • 7
    • 0027539801 scopus 로고
    • Self-Organization for Object Extraction Using a Multilayer Neural Network and Fuzziness Measures
    • Feb.
    • A. Ghosh, N. Pal, and S. Pal, "Self-Organization for Object Extraction Using a Multilayer Neural Network and Fuzziness Measures," IEEE Transactions on Fuzzy Systems, vol. 1, no. 1, Feb. 1993, pp. 54-68.
    • (1993) IEEE Transactions on Fuzzy Systems , vol.1 , Issue.1 , pp. 54-68
    • Ghosh, A.1    Pal, N.2    Pal, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.