Automatic defect classification in visual inspection of semiconductors using neural networks

IEICE Transactions on Information and Systems

Volumn E81-D, Issue 11, 1998, Pages 1261-1271

  Kameyama, Keisukc ^a   Kosugit, Yukio ^a   Okahashi, Tatsuo ^b   Izumita, Morishi ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

ADC; Clustering; Defect classification; Higher order neural network; Machine vision; Semiconductor manufacturing

Indexed keywords

FEATURE EXTRACTION; IMAGE ANALYSIS; INSPECTION; NEURAL NETWORKS; SEMICONDUCTOR DEVICE MANUFACTURE;

AUTOMATIC DEFECT CLASSIFICATION SYSTEMS (ADC); HIGHER-ORDER NEURAL NETWORKS; HYPERELLIPSOID CLUSTERING NETWORKS (HCN);

COMPUTER VISION;

EID: 0032206565     PISSN: 09168532     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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