Automatic defect pattern detection on LSI wafers using image processing techniques

IEICE Transactions on Electronics

Volumn E82-C, Issue 6, 1999, Pages 997-1002

  Maruo, Kazuyuki ^a   Shibata, Tadashi ^a   Yamaguchi, Takahiro ^a   Ichikawa, Masayoshi ^a  

^a ADVANTEST CORPORATION   (Japan)

Author keywords

Defect detection; Hough transfrom; Image processing; Image recognition; Wavelet transform

Indexed keywords

EID: 33746369502     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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