Defect detection algorithm for wafer inspection based on laser scanning

IEEE Transactions on Semiconductor Manufacturing

Volumn 10, Issue 4, 1997, Pages 459-468

  Nikoonahad, Mehrdad ^a,b   Wayman, Charles E ^a   Biellak, Stephen A ^a,b  

^a KLA TENCOR CORPORATION   (United States)

^b IEEE   (United States)

Author keywords

Defect detection; Laser scanning; Wafer inspection

Indexed keywords

ALGORITHMS; CRYSTAL DEFECTS; CRYSTAL IMPURITIES; LASER BEAMS; SCANNING; WSI CIRCUITS;

POINT SPREAD FUNCTIONS; WAFER INSPECTION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0031271325     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.641488     Document Type: Article

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