Mathematical modelling and simulation research of thermal engraving technology based on PMMA material

Micromachines

Volumn 7, Issue 3, 2016, Pages

  Han, Xiaowei ^a   Liu, Xiaowei ^a   Tian, Li ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

MEMS; Microchannel; Microfluidic chip

Indexed keywords

ETCHING; FLUIDIC DEVICES; HEAT TRANSFER; MEMS; MICROCHANNELS; MICROFLUIDICS; POLYMETHYL METHACRYLATES;

ENGRAVING TECHNOLOGY; FINITE ELEMENT SIMULATIONS; HEAT TRANSFER THEORY; LARGE-SCALE MANUFACTURING; MATHEMATICAL MODELLING AND SIMULATION; MICROFLUIDIC CHIP; ORTHOGONAL EXPERIMENT; TECHNOLOGICAL SUPPORTS;

FINITE ELEMENT METHOD;

EID: 84963976810     PISSN: None     EISSN: 2072666X     Source Type: Journal    
DOI: 10.3390/mi7030037     Document Type: Article

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