On the fabrication of minimizing bulges and reducing the feature dimensions of microchannels using novel CO2 laser micromachining

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Chung, C K ^a   Lin, S L ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANSYS SOFTWARE; EASY FABRICATION; FABRICATION PROCESS; FEATURE DIMENSIONS; FEATURE SIZES; LASER MICRO-MACHINING; LASER PROCESSING; NOVEL METHODS; RESOLIDIFICATION; SURFACE QUALITIES;

CARBON DIOXIDE; COMPOSITE MICROMECHANICS; COOLING; FABRICATION; MEMS; MICROMACHINING;

MICROCHANNELS;

EID: 79957931163     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065023     Document Type: Article

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