Micromachines driven by surface tension

30th Fluid Dynamics Conference

Volumn , Issue , 1999, Pages

  Kim, Chang Jin ^a  

^a Department of Civil and Environmental Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FLUID DYNAMICS;

CONTINUOUS ELECTROWETTING; DRIVING FORCES; DRY FRICTION; LOW VOLTAGES; MEMSDEVICES; MICROACTUATION; MICRODEVICES; SOLID ELEMENTS;

SURFACE TENSION;

EID: 84963729888     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)

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9. J. Simon, S. Saffer, and C.-J. Kim, “A Liquid- Filled Microrelay with a Moving Mercury Micro-Drop”, J. MEMS, Vol. 6, No. 3, Sept. pp. 208-216.
10. C.-J. Kim, “Large-Scale Mechanical Memory with Liquid-Metal Droplet”, 1997 NSF CAREER proposal. Related information can be found in http://cjmems.seas.ucla.edu.
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14. F.-G. Tseng, C.-J. Kim, and C.-M. Ho, “A Novel Microinjector with Virtual Chamber Neck”, Proc. IEEE MEMS Workshop, Heidelberg, Germany, Jan. 1998, pp. 57-62.
15. F.-G. Tseng, C.-J. Kim, and C.-M. Ho, “A Microinjector Free of Satellite Drops and Characterization of the Ejected Droplets”, Proc. MEMS, ASME 1MECE, Anaheim, CA. Nov. pp. 89-95.
16. C.-J. Kim, F.-G. Tseng, and C.-M. Ho, “Apparatus and Method for Using Bubble as Virtual Valve in Microinjector to Eject Fluid”, U.S. and PCT Patent pending, (serial No. 09/235,663).
17. T. K. Jun and C.-J. Kim, “Valveless Pumping using Traversing Vapor Bubbles in Microchannels”, J. Applied Physics, Vol. 83, No. 11, June 1998, pp. 5658-5664.
18. J. Lee and C.-J. Kim, “Liquid Micromotor Driven by Continuous Electrowetting”, Proc. IEEE MEMS Workshop, Heidelberg, Germany, Jan. 1998, pp. 538-543.
19. J. Lee and C.-J. Kim, “Microactuation by Continuous Electrowetting Phenomenon and Silicon Deep RIE Process”, Proc. MEMS, ASME IMECE, Anaheim, CA. Nov. 1998, pp. 475-480
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22. J. Simon, L.-S. Huang, B. Sridharan, and C.-J. Kim, “Microgasketing and Room Temperature Wafer Joining for Liquid-Filled MEMS Devices,” Proc. MEMS, ASME IMECE ’97, Dallas, TX, pp. 29-34, Nov. 1997.
23. C.-J. Kim, “Microgasketing and Adhesive Wicking for Fabrication of Micro Fluidic Devices”, Proc. Vol. 3515, Microfluidic Devices and Systems, SPIE Symp. Micromachining and Microfabrication, Santa Clara, CA, Sept. 1998, pp. 286-291.