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Volumn 13, Issue 2, 2016, Pages 279-286

Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges

(8) Hegemann, Dirk a Michlíček, Miroslav a,b Blanchard, Noémi E a Schütz, Urs a Lohmann, Dominik a,c Vandenbossche, Marianne a Zajíčková, Lenka b Drábik, Martin a

a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY (Switzerland)

b MASARYK UNIVERSITY (Czech Republic)

c RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

aging; cross linking; functional groups; ion bombardment; plasma polymer

Indexed keywords

AGING OF MATERIALS; COUPLED CIRCUITS; CROSSLINKING; DEPOSITION; ELECTRODES; FILM GROWTH; FUNCTIONAL GROUPS; GASES; GEOMETRY; ION BOMBARDMENT; IONIZATION OF GASES; PLASMA POLYMERIZATION; POLYMER FILMS; POLYMERS;

CAPACITIVELY COUPLED; CAPACITIVELY COUPLED DISCHARGES; GROUNDED ELECTRODES; PLASMA POLYMER FILMS; PLASMA POLYMERS; POLYMERIZATION PROCESS; REACTOR GEOMETRIES; SYMMETRIC VS. ASYMMETRIC;

ELECTRIC DISCHARGES;

EID: 84959176579 PISSN: 16128850 EISSN: 16128869 Source Type: Journal
DOI: 10.1002/ppap.201500078 Document Type: Article

Times cited : (37)

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