Plasma polymerization of acrylic acid revisited

Plasma Processes and Polymers

Volumn 6, Issue 4, 2009, Pages 246-254

  Hegemann, Dirk ^a   Körner, Enrico ^a   Guimond, Sébastien ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

Acrylic acid; Deposition rate; Plasma polymerization; Processing parameter; RF plasma

Indexed keywords

ACRYLIC ACID; ACRYLIC ACIDS; ENERGY INPUTS; ETCHING EFFECT; LOW-TO-HIGH; PARAMETER RANGE; POLYMERIZATION MECHANISMS; PROCESSING PARAMETER; RF PLASMA; SYSTEMATIC STUDY; TRANSITION REGIMES;

CARBOXYLIC ACIDS; DEPOSITION RATES; ELECTRIC DISCHARGES; OLIGOMERIZATION; ORGANIC ACIDS; PLASMA POLYMERIZATION; PLASMA THEORY; POLYMERS; WAVE PLASMA INTERACTIONS;

PLASMA DEPOSITION;

EID: 67651207834     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200800089     Document Type: Article

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