From V. B. Aleskovskii's "framework" Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition

Chemical Vapor Deposition

Volumn 21, Issue 10-12, 2015, Pages 216-240

  Malygin, Anatolii A ^a   Drozd, Victor E ^b   Malkov, Anatolii A ^a   Smirnov, Vladimir M ^b  

^a ST PETERSBURG STATE INSTITUTE OF TECHNOLOGY TECHNICAL UNIVERSITY   (Russian Federation)

^b ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

"framework" hypothesis; ALD; history; molecular layering

Indexed keywords

DEPOSITION; HISTORY;

CHEMICAL TRANSFORMATIONS; FRAMEWORK HYPOTHESIS; INTERNATIONAL SCIENTISTS; LAYERING TECHNIQUES; MOLECULAR LAYERING; SCIENTIFIC COMMUNITY; SCIENTIFIC RESULTS; SCIENTIFIC SCHOOLS;

ATOMIC LAYER DEPOSITION;

EID: 84957809436     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201502013     Document Type: Review

References (187)

1. S. I. Kol'tsov, Synthesis of "multilayered" inorganic polymers, Abstract of Scientific and Technical Conference, Goskhimizdat, Leningrad, 1963, p. 27. (in Russian).
2. S. I. Kol'tsov, Zh. Prikl. Khim. 1965, 38, 1384. [J. Appl. Chem. USSR 1965, 38, 1352.].
3. S. I. Kol'tsov, G. N. Kuznetsova, V. B. Aleskovskii, Zh. Prikl. Khim. 1967, 40, 2774. [J. Appl. Chem. USSR 1967, 40, 2644.].
4. A. M. Shevjakov, G. N. Kuznetsova, V. B. Aleskovskii, Interaction terahloridov titanium and germanium with hydrated silica. Proceedings of 2nd USSR Conference on High Temperature Chemistry of Oxides, Leningrad, USSR, 26-29 November 1965, Nauka, Leningrad. 1967, pp. 149-155. (in Russian).
5. S. I. Kol'tsov, V. B. Aleskovskii, Zh. Fiz. Khim. 1968, 42, 1210. [Russ. J. Phys. Chem. 1968, 42, 630.].
6. S. I. Kol'tsov, A. N. Volkova, V. B. Aleskovskii, Izv. Vysshikh Uchebn. Zavedenenii, Khim. i Khim. Tekhnol. 1969, 12, 1633. (in Russian).
7. S. I. Kol'tsov, Zh. Prikl. Khim., 1969, 42, 1023. [J. Appl. Chem. USSR 1969, 42, 975].
8. V. B. Aleskovskii, S. I. Kol'tsov, Some aspects of molecular layering reactions. Abstract of Scientific and Technical Conference, Goskhimizdat,Leningrad, 1965, p. 67. (in Russian).
9. S. I. Kol'tsov, V. B. Aleskovskii, Evolution of the silica particle porosity during molecular layering process. Abstract of Scientific and Technical Conference, Goskhimizdat, Leningrad, 1968 p. 23. (in Russian).
10. R. L. Puurunen, J. Appl. Phys. 2005, 97, 121301.
11. V. Miikkulainen, M. Leskela, M. Ritala, R. L. Puurunen, J. Appl. Phys. 2013, 113, 021301.
12. G. N. Parsons, S. M. George, M. Knez, Progress and future directions for atomic layer deposition and ALD-based chemistry in Materials Research Society Bulletin 2011, 36, 865.
13. G. N. Parsons, J. W. Elam, S. M. George, S. Haukka, H. Jeon, W. M. M. Kessels, M. Leskelä, P. Poodt, M. Ritala, S. M. Rossnagel, J. Vac. Sci. Technol. A 2013, 31, 050818.
14. T. Suntola, J. Antson, International patent, US 4 058 430, priority Nov 29, 1974, publication Nov 15, 1977, SU 810085, publication in the USSR Feb 28, 1981.
15. A. A. Malygin, A. A. Malkov, S. D. Dubrovenskii, The chemical basis of surface modification technology of silica and alumina by molecular layering method in Book Adsorption on new and modified inorganic sorbents, V. 99 of Stud. Surf. Sci. Catal. (Eds: A. Dabrowski and V. A. Tertykh), Elsevier, Amsterdam, 1996), pp. 213-236.
16. A. A. Malygin, The molecular layering method as a basis of chemical nanotechnology. In Book Natural Microporous Materials in Environmental Technology, NATO Science Series, Kluwer, Academic Publishers, Dordrecht, 1999, pp. 487-495
17. A. A. Malygin, V. M. Smirnov, Solid State Technology, March, 2002, p. 14.
18. Virtual Project on the History of ALD (VPHA) overview, http://vph-ald.com (accessed November 2015).
19. J. Aarik, A. R. Akbashev, M. Bechelany, M. Berdova, D. Cameron, N. Chekurov, V. E. Drozd, S. D. Elliott, G. Gottardi, K. Grigoras, T. Kallio, J. Kanervo, Yu. Koshtyal, M.-L. Kaariainen, T. Kaariainen, L. Lamagna, A. Malkov, A. Malygin, C. Ozgit-Akgun, H. Pedersen, R. L. Puurunen, A. Pyymaki Perros, R. H. A. Ras, F. Roozeboom, T. Sajavaara, H. Savin, T. E. Seidel, P. Sundberg, J. Sundqvist, M. Tallarida, J. R. van Ommen, T. Wachtler, C. Wiemer, O. M. E. Ylivaara, Overview of early publications on Atomic Layer Deposition, 12th International Baltic Conference on Atomic Layer Deposition, May 12-13, 2014, Helsinki, Finland (poster presentation).
20. J. Aarik, A. R. Akbashev, M. Bechelany, M. Berdova, D. Cameron, N. Chekurov, V. E. Drozd, S. D. Elliott, G. Gottardi, K. Grigoras, M. Junige, T. Kallio, J. Kanervo, Yu,., Koshtyal, M.-L. Kaariainen, T. Kaariainen, L. Lamagna, A. Malkov, A. Malygin, J. Molarius, C. Ozgit-Akgun, H. Pedersen, R. L. Puurunen, A. Pyymaki Perros, R. H. A. Ras, F. Roozeboom, T. Sajavaara, H. Savin, T. E. Seidel, P. Sundberg, J. Sundqvist, M. Tallarida, J. R. van Ommen, T. Wachtler, C. Wiemer, O. M. E. Ylivaara, On the Early History of ALD: Molecular Layering, AVS 14th International Conference on Atomic Layer Deposition, June 15-18, 2014, Kyoto, Japan (poster presentation).
21. R. L. Puurunen, Chem. Vap. Deposition 2014, 20, 332.
22. Jr. R. Arthur, J. Appl. Phys. 1968, 39, 4032.
23. G. M. Bliznakov, K. Petrov, Proc. Bulgarian Acad. Sc. 1974, 27, 365.
24. D. Damyanov, D. Mehandjiev, Bulgarian Academy of Sciences. Communications of the Department of Chemistry 1976, 9, 394.
25. W. Hanke, R. Bienert, H.-G. Jerschkewitz, Z. Anorg. Allg. Chem. 1975, 414, 109.
26. W. Hanke, K. Heise, H.-G. Jerschkewitz, G. Lischke, G. Ohlmann, B. Parlitz,. Z. Anorg. Allg. Chem. 1978, 438, 176.
27. V. A. Khalif, E.L. Aptekar', O.V. Krylov, G. Öhlmann, Kinet. i Katal, 1977, 18, 1055 (in Russian).
28. G. Ohlmann, Bulgarian Academy of Sciences. Communications of the department of Chemistry 1980, 13, 48.
29. E-L. Lakomaa, S. Haukka, T. Suntola, Appl. Surf. Sci. 1992, 60-61, 742.
30. S. I. Kol'tsov, V. B. Aleskovskii, Silica Gel: Its Structure and Chemical Properties. Goskhimizdat, Leningrad, 1963, pp. 94 (in Russian).
31. T. Suntola, A. Pakkala, S. Lindfors, International patent, FIN 57975, US 4 413 022, priority Feb 28, 1979, publication Nov 1, 1983, SU 1085510, publication in the USSR. July 04, 1984.
32. V. B. Aleskovskii, Zh. Prikl. Khim. 1974, 47, 2145. [J. Appl. Chem. USSR. 1974, 47, 2207.].
33. V. B. Aleskovskii, Stoichiometry and Synthesis of Solid Compounds, Nauka, Leningrad, 1976, 142 pp. (in Russian).
34. V. B. Aleskovskii, Chemistry of solids. Proc. The manual for high schools., Higher. School, Moscow, 1978, 256 pp. (in Russian).
35. V. B. Aleskovskii, Chemistry supramolecular compounds. Publishing house of St. Petersburg University, 1996, 253 pp. (in Russian).
36. V. B. Aleskovskii, Chemical and information synthesis. The beginnings of the theory. Methods. Tutorial. SPb, Publishing house of St. Petersburg University, 1 St. Petersburg, 1997, 72 pp. (in Russian).
37. V. B. Aleskovskii, Zh. Obshch. Khim. 2002, 72, 4.2368. (in Russian).
38. V. B. Aleskovskii, Zh. Obshch. Khim. 1995, 65, 1928. (in Russian).
39. V. B. Aleskovskii, Zh. Prikl. Khim. 2007, 80, 1761. [J. Appl. Chem. USSR. 2007, 80, 1875.]
40. V. B. Aleskovskii, O. K. Sulimov, Patent Rus. 2172731, 2000119621/04. 13.07.2000. 27.08.2001. There were not patents in the Soviet Union, there were copyright certificates. But in Russia there are not copyright certificates, there are patents.
41. V. B. Aleskovskii, Framework hypothesis and experience the preparation of certain active catalysts. Doktoral dissertation. LTI by Lensovet, 1952, p. 65. (in Russian).
42. V. B. Aleskovskii, Bull.Acad. Sci. USSR. 1975, 6, 48. (in Russian).
43. S. I. Kol'tsov, Synthesis of solids by the Molecular Layering Method. Doktoral dissertation, LTI by Lensovet, 1971, 383 pp. (in Russian).
44. A. P. Dushina, V. B. Aleskovskii, Silica Gel-inorganic cations, Goskhimizdat, Leningrad, 1963, pp. 91. (in Russian).
45. S. I. Kol'tsov, G. N. Kuznetsova, V. B. Aleskovskii, Neorg. Mater. 1967, 3, 894. [Inorg. Mater. 1967, 3, 800.].
46. S. I. Kol'tsov, A. N. Volkova, V. B. Aleskovskii, Izv. Vysshikh Uchebn. Zavedenenii, Ser. Khim. i Khim. Tekhnol. 1969, 12, 1633. (in Russian).
47. S. I. Kol'tsov, A. N. Volkova, V. B. Aleskovskii, Zh. Prikl. Khim. 1969, 42, 1028. [J. Appl. Chem. USSR 1969, 42, 980.].
48. R. B. Merrifield, J. Am. Chem. Soc. 1963, 85, 2149.
49. S. D. Dubrovenskii, A. A. Malygin, Russ. Khim. Zh. 2009, 53, 98. (in Russian).
50. S. I. Kol'tsov, G. V. Sveshnikova, V. B. Aleskovskii, Izv. Vysshikh Uchebn. Zavedenenii, Ser. Khim. i Khim. Tekhnol. 1969, 12, 562. (in Russian).
51. G. V. Sveshnikova, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Prikl. Khim. 1970, 43, 430. [J. Appl. Chem. USSR 1970, 43, 432.].
52. R. R. Rachkovskii, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Neorg. Khim. 1970, 15, 3158. [Russ. J. Inorg. Chem. 1970, 15, 1646.].
53. A. N. Volkova, A. A. Malygin, V. M. Smirnov, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Obshch. Khim. 1972, 42, 1431. [J. Gen. Chem. USSR 1972, 42, 1422.].
54. A. A. Malygin, A. N. Volkova, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Obshch. Khim. 1973, 43, 1436. [Rus. J. Gen. Chem. 1973, 43, 1426.].
55. S. I. Kol'tsov, V. M. Smirnov, V. B. Aleskovskii, Kinet. i Katal. 1970, 11, 1013. [Kinetics and Catalysis 1970, 11, 835.].
56. S. I. Kol'tsov, V. M. Smirnov, V. B. Aleskovskii, Kinet i Katal. 1973, 14, 1300. (in Russian).
57. S. I. Kol'tsov, T. V. Uhova, A. N. Volkova, Zh. Prikl. Khim. 1974, 47, 20. [J. Appl. Chem. USSR 1974, 47, 18.].
58. E. P. Smirnov, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Fiz. Khim. 1979, 53, 258. (in Russian).
59. A. A. Malygin, S. I. Kol'tsov, V.B. Aleskovskii, Zh. Obshch. Khim. 1979, 49, 1936. [J. Gen. Chem. USSR. 1979, 49, 1703.].
60. V. B. Kopylov, A. N. Volkova, S. I. Kol'tsov, V. M. Smirnov, V. B. Aleskovskii, Izv. Vssh. Ucheb. Zaved. Ser. Khim. i Khim Tekhnol. 1972 15, 957. (in Russian).
61. G. V. Sveshnikova, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Prikl. Khim. 1970, 43, 1150. [J. Appl. Chem. USSR 1970, 43, 1155.].
62. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Obshch. Khim. 1973, 43, 724. [Rus. J. Gen. Chem. 1973, 43, 723.].
63. S. I. Kol'tsov, Zh. Prikl. Khim. 1969, 42, 1023. [Russ. J. Appl. Chem. USSR 1969, 42, 975.].
64. A. A. Abakumov, Yu. K. Ezhovskii, S. I. Kol'tsov, Zh. Prikl. Khim. 1985, 58, 1867. [Russ. J. Appl. Chem. USSR 1985, 58, 1718.].
65. A. B. Zhidkov, E. P. Smirnov, Kinet. i Katal. 1988, 29, 946. [Kinet. Catal. 1988, 29, 813.].
66. S. I. Kol'tsov, A. N. Volkova, V. B. Aleskovskii, Zh. Fiz. Khim. 1972, 46, 1292. [Russ. J. Phys. Chem. 1972, 46, 742.)].
67. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Neorg. Khim. 1975, 20, 2695. (in Russian).
68. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. B. Aleskovskii, Copyright certificate USSR 422446, Bulletin of Inventions (Russian), 13, 1974.
69. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. B. Aleskovskii,., V. N. Postnov, Copyright certificate USSR 458156 (Russian), 1974.
70. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Obshch. Khim. 1975, 45, 3. (in Russian).
71. A. A. Malygin, A. N. Volkova, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Obshch. Khim. 1976, 46, 2166. [Rus. J. Gen. Chem. 1976, 46, 2085].
72. A. N. Volkova, S. I. Kol'tsov, V. B. Aleskovskii, Izv. Vysshikh Uchebn. Zavedenenii, Khim. i Khim. Tekhnol. 1969, 12, 863. (in Russian).
73. A. N. Volkova, S. I. Kol'tsov, V. B. Aleskovskii, Izv. Vysshikh Uchebn. Zavedenenii, Ser. Khim. i Khim. Tekhnol. 1971, 14, 26. (in Russian).
74. A. A. Malygin, A. N. Volkova, S. I. Kol'tsov, V. B. Aleskovskii, Izv. Vysshikh Uchebn. Zavedenenii, Ser. Khim. i Khim. Tekhnol. 1971, 14, 332. (in Russian).
75. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. B. Aleskovskii, Izv. Vysshikh Uchebn. Zavedenenii, Khim. i Khim. Tekhnol. 1971, 14, 1509. (in Russian).
76. A. A. Malygin, A. N. Volkova, S. I. Kol'tsov, V. B. Aleskovskii, Izv. Vysshikh Uchebn. Zavedenenii, Ser. Khim. i Khim. Tekhnol. 1971, 14, 1774. (in Russian).
77. V. N. Pak, N.G. Ventov, A. A. Malkov, Zh. Electrocim. 1974, 10, 288. (in Russian).
78. S. I. Kol'tsov, V. E. Drozd, V. B. Aleskovskii, Dokl. Akad. Nauk SSSR, 1976, 229, 1145. [Proc. USSR Acad. 1976, 229, 718.].
79. A. A. Malygin, The molecular layering method: progress in science and practical works for creation of functional nanomaterials, in Book Surface Chemistry in Biomedical and Environmental Science. (Eds: J.P. Blitz and V.M. Gunko). Springer. Dordrecht 2006, pp. 35-44.
80. A. A. Malygin, J. Ind. Eng. Chem. 2006, 12, 1.
81. A. A. Malygin, Russ. Nanotechnol. 2007, 2, 87. (in Russian).
82. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. M. Smirnov, V. B. Aleskovskii, Copyright certificate USSR 356242, Bulletin of Inventions (Russian) numero sign 20, 1972.
83. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. M. Smirnov, V. B. Aleskovskii,. Copyright certificate USSR 369783, 1974.
84. A. A. Malygin, A. N. Volkova, S. I. Kol'tsov, V. B. Aleskovskii, Copyright certificate USSR numero sign 422447, Bulletin of Inventions (Russian) 13, 1974.
85. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. B. Aleskovskii, N. N. Stafeeva, Copyright certificate USSR numero sign 440338, Bulletin of Inventions (Russian) 31, 1974.
86. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. M. Smirnov, V. B. Aleskovskii, Copyright certificate USSR 369783, 1974.
87. A. N. Volkova, A. A. Malygin, S. I. Kol'tsov, V. M. Smirnov, V. B. Aleskovskii, Copyright certificate USSR 356242. Bulletin of Inventions (Russian) 1972, 20.
88. E. P. Smirnov, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Obshch. Khim. 1973, 43, 1657. (in Russian).
89. E. P. Smirnov, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Obshch. Khim. 1974, 44, 961. (in Russian).
90. M. A. Eremeeva, A. P. Nechiporenko, G. N. Kuznetsova, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Prikl. Khim. 1974, 47, 2332. [J. Appl. Chem. USSR 1974, 47, 2390.].
91. S. I. Kol'tsov, V. B. Kopylov, V. M. Smirnov, V. B. Aleskovskii, J. Appl. Chem. USSR 1976, 49, 525.
92. V. I. Koval'kov, A. A. Malygin, S. I. Kol'tsov, Zh. Prikl. Khim. 1976, 49, 2355. [J. Appl. Chem. USSR. 1977, 50, 450.].
93. A. A. Malkov, S. I. Kol'tsov, V. D. Ivin, E. P. Smirnov, V. B. Aleskovskii, Zh. Prikl. Khim. 1976, 49, 1650. (in Russian).
94. A. A. Malygin, S. I. Kol'tsov, V. B. Aleskovskii,. A.S. USSR 568894. Bulletin of Inventions (Russian) 1977, 30.
95. N. A. Stepanova, V. M. Smirnov, S. I. Kol'tsov, V. B. Aleskovskii, Zh. Prikl. Khim. 1977, 50, 465. (in Russian).
96. S. I. Kol'tsov, V. E. Drozd, T. A. Redrova, V. B. Aleskovskii, Dokl. Akad. Nauk SSSR 1977, 235, 1090. [Dokl. Phys. Chem. 1977, 235, 794].
97. A. M. Postnova, S. I. Kol'tsov, Zh. Obshch. Khim. 1978, 48, 941. [J. Gen. Chem. USSR 1978, 48, 861.].
98. V. P. Tolstoy, G. N. Kuznetsova, S. I. Kol'tsov, V. B. Aleskovskii, Dokl. Akad. Nauk SSSR. 1978, 242, 373. (in Russian).
99. S. K. Gordeev, E. P. Smirnov, S. G. Zhukov, S. I. Kol'tsov, V. B. Aleskovskii, V. V. Digonskii, Copyright certificate USSR, 73168, priority Jan 06, 1978.
100. V. N. Krylov, M. M. Mironova, V. E. Drozd, S. I. Kol'tsov, V. B. Aleskovskii, Semiconductors 1979, 13, 2272. (in Russian).
101. V. B. Aleskovskii, V. E. Drozd, V. F. Kiselev, S. N. Kozlov, S. I. Kol'tsov, A. S. Petrov, G. S. Plotnikov, Fiz. Tekh. Poluprovodn. 1979, 13, 1397. [Sov. Phys. Semicond. 1997, 13, 817.
102. V. K. Gromov, R. R. Rachkovskii, S. I. Kol'tsov, Zh. Prikl. Khim. 1980, 53, 2151. (in Russian).
103. M. N. Tsvetkova, A. A. Malygin, S. I. Kol'tsov, Zh. Prikl. Khim. 1980, 53, 1226. [Russ. J. Appl. Chem. USSR 1980, 53, 952.].
104. A. A. Malygin, Yu. N. Orlov, V. I. Seliverstov, M. S. Baronova, Copyright certificate USSR 729646. Bulletin of Inventions (Russian) 1980, 15.
105. S. I. Kol'tsov, N. N. Kopylov, V. E. Drozd, V. B. Aleskovskii, Dokl. Akad. Nauk SSSR. 1981, 256, 1415. (in Russian).
106. E. A. Avrutina, A. V. Gusev, S. I. Kol'tsov, G. N. Kuznetsova, A. A. Malygin, Zh. Prikl. Khim. 1981, 54, 2125. [J. Appl. Chem. USSR 1981, 54, 1861.].
107. P. M. Vainshtein, Yu. K. Ezhovskii, S. I. Kol'tsov, Zh. Fiz. Khim. 1981, 55, 394. (in Russian).
108. V. D. Sokolov, E. P. Smirnov, S. I. Kol'tsov, V. B. Aleskovskii, Dokl. Akad. Nauk SSSR 1981, 256, 1443. (in Russian).
109. A. V. Krasnobryzhii, E. P. Smirnov, S. I. Kol'tsov, Zh. Prikl. Khim. 1981, 54, 1605. [J. Appl. Chem. USSR. 1981, 54, 1375.].
110. S. I. Kol'tsov, S. A. Trifonov, A. A. Malygin, V. V. Barsova, Plasticheskie massy 1981, 7, 59. (in Russian).
111. V. F. Dergachev, A. A. Malygin, S. I. Kol'tsov, Zh. Prikl. Khim. 1981, 54, 1972. [J. Appl. Chem. USSR. 1981, 54, 1722.].
112. N. A. Stepanova, V. M. Smirnov, S. I. Kol'tsov, V. B. Aleskovskii, J. Appl. Chem. USSR 1981, 54, 1726.
113. S. I. Kol'tsov, N. N. Kopylov, V. E. Drozd, V. B. Aleskovskii, Dokl. Akad. Nauk SSSR 1981, 256, 1415. (in Russian).
114. S. I. Kol'tsov, N. N. Kopylov, V. E. Drozd, O. A. Trofimov, V. B. Aleskovskii, Dokl. Akad. Nauk SSSR. 1982, 262, 375. (in Russian).
115. V. A. Tolmachev, Zh. Prikl. Khim. 1982, 55, 1410. [J. Appl. Chem. USSR. 1982, 55, 1298.]
116. S. K. Gordeev, E. P. Smirnov, S. I. Kol'tsov, Zh. Obshch. Khim. 1982, 52, 1468. [J. Gen. Chem. USSR. 1982, 52, 1298.].
117. L. V. Frolov, I. O. Protod'yakonov, A. A. Malygin, S. I. Kol'tsov, V. F. Dergachev, Copyright certificate USSR 904724, Bulletin of Inventions (Russian) 1982, 6.
118. S. I. Kol'tsov, S. V. Kuzcherov, V. F. Dergachev, A. A. Malygin, I. O. Protod'yakonov, Y. P. Ylinez, Chem. and petroleum engineering, scientific and tech. Moscow, 1983, 6, 1-2. (in Russian).
119. V. F. Dergachev, A. A. Malygin, S. A. Trifonov, S. I. Kol'tsov, Copyright certificate USSR 1018710. Bulletin of Inventions (Russian) 1983, 19.
120. S. I. Kol'tsov, V. I. Koval'kov, T. A. Vitkovskaia, Copyright certificate USSR 1045609, 1983.
121. V. N. Postnov, Synthesis inorganic silica-based matrices by chemical assembly. In Book Napravlennyi Sintez Tverdykh Veshchestv. (Ed: V. B. Aleskovskii). LGY, Leningrad, 1983, 1, pp. 118-126. (in Russian).
122. V. A. Tolmachev, V. A., M. A. Okatov, Sov. J. Opt. Technol. 1983, 50, 706.
123. V. A. Tolmachev, M. A. Okatov M. A., V. V. Pal'chevskii, Sov. J. Opt. Technol. 1984, 51, 368.
124. Y. M. Artemyev, V. M. Smirnov, Vestnilk LGU. Ser. Fisika, khimiy. 1984, 16, 122. (in Russian).
125. A. L. Egorov, Yu. K. Ezhovskii, S. I. Kol'tsov, G. V. Anikeev, Zh. Prikl. Khim. 1984, 57, 2593. [J. Appl. Chem. USSR. 1984, 57, 2395.].
126. V. B. Aleskovskii, V. A. Zcabotinskii, V. M. Smirnov, V. P. Tolstoy, S. N. Grusinov, Copyright certificate USSR 1202457. Bulletin of Inventions (Russian) 1985.
127. S. I. Kol'tsov, B. X. Dobruskin, S. V. Kuraschvili, Zh. Prikl. Khim. 1985, 58, 661. (in Russian).
128. A. V. Evdokimov, A. A. Malygin, S. I. Kol'tsov, Zh. Prikl. Khim. 1985, 58, 2358. (in Russian).
129. A. A. Seitmagzimov, V. N. Pak, S. I. Kol'tsov, Zh. Prikl. Khim. 1985, 58, 92. [J. Appl. Chem. USSR 1985, 58, 85.].
130. A. V. Brykalov, S. I. Kol'tsov, V. I. Koval'kov, A. M. Postnova, Zh. Fiz. Khim. 1986, 60, 950. [Russ. J. Phys. Chem., 1986, 60, 564.].
131. V. B. Aleskovskii, V. E. Drozd, V. I. Gubaidullin, A. I. Romanichev, Dokl. Akad. Nauk SSSR. 1986, 291, 136. (in Russian).
132. G. V. Anikeev, Yu. K. Ezhovskii, A. I. Klusevich, Zh. Prikl. Khim. 1986, 59, 2661. [J. Appl. Chem. USSR 1986, 59, 2431.].
133. S. I. Kol'tsov, A. V. Kriul'kin, Zh. Prikl. Khim. 1987, 60, 1250. (in Russian).
134. V. A. Mitnikov, Yu. K. Ezhovskii, Zh. Prikl. Khim. 1987, 60, 1225. (in Russian).
135. A. P. Nechiporenko, A. I. Kudrychova, Zh. Obshch. Khim. 1987, 57, 752. (in Russian).
136. N. A. Stepanova, E. Y. Popova, A. A. Malygin, M. Z. Rachman, Copyright certificate USSR 1351879. Bulletin of Inventions (Russian) 1987, 42, 124.
137. S. V. Muraschov, A. T. Denisova, Yu. K. Ezhovskii, Zh. Prikl. Khim. 1987, 60, 2361. (in Russian).
138. N. A. Stepanova, V. D. Kupriyanov, A. A. Malygin, Neorg. Mater. 1987, 23, 377. [Inorg. Mater. 1987, 23, 331.].
139. V. P. Tolstoy, S. N. Grusinov, Copyright certificate USSR numero sign 1359261. Bulletin of Inventions (Russian) 1987, 46.
140. A. A. Malygin, Yu. K. Ezhovskii,. Equipment of chemical process of assembly materials, textbook, LTI by Lensovet, Leningrad 1987, 9 6 pp. (in Russian).
141. A. Aidla, A.-A. Tammik,. About a New Method for Producing Electroluminescent Thin Film Structures. Acta et Commtntationes Universitatis Tartuensis 1983, 655, pp. 120-130. (in Russian).
142. M. Velikova, D. Damyanov, D. Mehandjiev,. Bulgarian Academy of Sciences. Communications of the department of Chemistry 1979, 12, 647.
143. B. Horvath, J. Strutz, E. G. Geyer-Lippmann, Z. anorg. allg. Chem. 1981, 483, 181.
144. G. Ohlmann, Z. Chemie 1984, 24, 161.
145. S. I. Kol'tsov, A. S. Yakovlev, L. L. Buchalov, Surface. Fizika, chemistry, mehanika 1992, 5, 75. (in Russian).
146. E. P. Smirnov, A.V. Krasnobryzhii, S. I. Kol'tsov, Izvestiya Vysshikh Uchebnykh Zavedenii, Ser. Khim. i Khim. Tekhnologiya 1981, 24, 1288. (in Russia).
147. E. P. Smirnov, A. A. Malkov, A. V. Krasnobryzhy, S. K. Gordeyev, Khimicheskaya fizika 1983, 2, 1109. (in Russian).
148. V. B. Aleskovskii, V. E. Drozd, V. I. Gubaidullin, A. I. Romanichev, Dokl. Akad. Nauk SSSR 1986, 291, 136. (in Russian).
149. V. K. Adamchuk, V. B. Aleskovskii, V. E. Drozd, V. I. Gubaidullin, A. F. Fedorov, A. I. Romanichev, Dokl. Akad. Nauk SSSR. 1988, 303, 1390. (in Russian).
150. A. I. Romanichev, V. B. Aleskovskii, V. E. Drozd, Zh. Prikl. Khim. 1989, 62, 841. (in Russian).
151. V. B. Aleskovskii, V. E. Drozd, A. I. Romanichev, Zh. Prikl. Khim. 1989, 62, 14. (in Russian).
152. A. I. Romanyzcev, Zh. Prikl. Khim. 1992, 65, 2672. (in Russian).
153. A. N. Nevzorov, V. E. Drozd, V. F. Kiselev, Vestn. MGU 1983, 24, 60. (in Russian).
154. V. E. Drozd, A. I. Romanichev, L. P. Bogdanova, Poverchnost 1983, 3, 90. (in Russian).
155. V. E. Drozd, L. V. Levshin, G. S. Plotnikov, Zh. Prikl. Spektrosk. 1983, 41, 575. (in Russian).
156. V. E. Drozd, L. V. Levshin, G. S. Plotnikov, Vestn. MGU 1986, 27, 50. (in Russian).
157. V. B. Aleskovskii, V. E. Drozd, Acta Polytech. Scand. 1990, 195, 155.
158. V. A. Glinkin, A. A. Biktaschev, R. N. Murtasin, Kazan Herald. tehnol. Univ. 2014, 19, 276. (in Russian).
159. A. K. D'yakova, S. A. Trifonov, E. A. Sosnov, A. A. Malygin, The molecular layering method as a basis of chemical nanotechnology, in Handbook of Research on Nanomaterials, Nanochemistry and Smart Materials. (Ed: A.K. Haghi, G.E. Zaikov), Nova Science Publishers, NY, 2012, pp. 195-204.
160. A. A. Malygin, A. A. Malkov, S. V. Mikhailovskii, N. L. Basov, M. M. Ermilova, N. V. Orekhova, G. F. Tereschenko, Nanotechnologies in Russia 2010, 5, 160.
161. A. A. Malygin, A. A. Malkov, S. V. Mikhaylovskiy, S. D. Dubrovensky, N. L. Basov, M. M. Ermilova, N. V. Orekhova, G. F. Tereschenko, Membranes Prepared via Molecular Layering Method, in Book Membranes for Membrane Reactors: Preparation, Optimization and Selection (Eds: by A. Basile and F. Gallucci), Wiley, Chichester, 2011, pp. 357-369.
162. A. A. Malygin, Functional nanomaterials "core-shell" structure, synthesized by the method of molecular layering, in Handbook Nanomaterials:properties and prospects of application/ collective of authors, (Ed: A. B. Yaroslavtsev), Scientific World, Moscow, 2015, pp. 84-113.
163. A. A. Malkov, A. A. Malygin, I. V. Egorova, S. V. Vikhman, G. L. Brusilovskii, V. A. Silin, N. A. Kulikov, Effect of chromium oxides nanodopants on thermal transformations of ceramic mass, Bulletin of St Petersburg State Institute of Technology (Technical University) 2013, 19 (45), pp. 71-76.
164. N. V. Kulakov, S. D. Dubrovenskii, A. A. Malygin, Zh. Prikl. Khim. 2006, 79, 177. (in Russian).
165. th Ann. Acad O.O. Chuiko. Kyiv, 18-21 may 2010. Progr. & Abstracts Book.-: Chuiko Inst. of Surface Chemistry, Kyiv, 2010, pp. 170-171.
166. A. N. Gukova, S. D. Dubrovenskii, A. A. Malygin, Zh. Obshch. Khim. 2010, 80, 1008. (in Russian).
167. S. A. Trifonov, V. A. Lapikov, A. A. Malygin, Zh. Prikl. Khim. 2002, 75, 986. [Russ. J. Appl. Chem. 2002, 75, 969.].
168. S. A. Trifonov, A. K. D'ykova, A. A. Malygin, Zh. Prikl. Khim. 2007, 80, 2041. (in Russian).
169. N. Yu. Efimov, G. V. Zhukov, E. A. Sosnov, A. A. Malygin, Zh. Prikl. Khim. 2012, 85, 659. (in Russian).
170. S. A. Trifonov, E. A. Sosnov, A. A. Malygin, Zh. Prikl. Khim. 2004, 77, 1872. (in Russian).
171. A. A. Malkov, E. A. Sosnov, A. A. Malygin, N. A. Kulikov, G. L. Brusilovskii, E. G. Kalinikos, Physics and Chemistry of Glass 2006, 32, 100. (in Russian).
172. E. A. Sosnov, V. P. Dorofeev, A. A. Malkov, A. A. Malygin, N. A. Kulikov, G. L. Brusilovsky, Semiconductors 2007, 41, 498.
173. E. A. Sosnov, A. A. Malygin, J. Surf. Investigation. X-ray, Synchrotron and Neutron Techniques 2008, 2, 699.
174. Surface Chemistry and Nanotechnology highly organized substances: Sb. scientific papers, SPbSTI (TU), St. Petersburg 2007, 320 pp. (in Russian).
175. V. M. Smirnov, Zh. Obshch. Khim. 2002, 72, 590. (in Russian).
176. E. G. Zemtsova, D. V. Yuchuk, V. M. Smirnov, Sci. World J. 2014, Article ID 979510, 12.
177. V. E. Drozd, Patent RU 2331717 priority Oct 02, 2006, publication Aug 20, 2008.
178. V. E. Drozd, Patent RU 2342469, priority Dec 07, 2006, publication Dec 27, 2008.
179. V. A. Mayorov, A. M. Yafyasov, V. B. Bozhevolnov, V. F. Radantsev, Fizika i tekhnika poluprovodnikov 2010, 44, 590. (in Russian).
180. V. P. Tolstoy, Russ. Chem. Rev. 2006, 75, 183. (in Russian).
181. th anniversary of the Department of Chemical of Solid, St. Petersburg State University, ed: I.V. Murin) St. Petersburg State University St. Petersburg, 2003, 315 pp.
182. S. I. Kol'tsov, Chemical transformations on the surface of solids. Lectures, LTI by Lensovet, Leningrad, 1984, 60 pp. (in Russian).
183. Workshop on Solid State Chemistry: Textbook (Eds: S. I. Kol'tsov, V. G. Korsakov, V. M. Smirnov), Leningrad State University, Leningrad, 1985, 224 pp. (in Russian).
184. S. I. Kol'tsov, Reactions Molecular Layering. Text of lectures, Saint Petersburg St. Petersburg State Technological Institute (Technical University), St. Petersburg, 1992, 63 pp. (in Russian).
185. A. V. Belyakov, E. V. Zharikov, A. A. Malygin, Chemical basis of solid-phase nanotechnology materials of various functional purpose. Study posobieb, SPbSTI (TU), St. Petersburg, 2006, 102 pp. (in Russian).
186. A. A. Malygin, Chemical assembly of functional nanomaterials by atomic layer deposition. Text of lectures, SPbSTI (TU), St. Petersburg, 2012, 74 pp. (in Russian).
187. A. A. Malygin, A. A. Malkov, Properties and application of functional nanomaterials: Text of lectures, SPbSTI (TU), St. Petersburg, 2013, 71 pp. (in Russian).