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Volumn 8, Issue 6, 2016, Pages 3555-3564

Ultra-large suspended graphene as a highly elastic membrane for capacitive pressure sensors

(9) Chen, Yu Min a He, Shih Ming a Huang, Chi Hsien b Huang, Cheng Chun c Shih, Wen Pin c Chu, Chun Lin d Kong, Jing e Li, Ju f Su, Ching Yuan a

a NATIONAL CENTRAL UNIVERSITY (Taiwan)

b MING CHI UNIVERSITY OF TECHNOLOGY (Taiwan)

c NATIONAL TAIWAN UNIVERSITY (Taiwan)

d NATIONAL NANO DEVICE LABORATORIES (Taiwan)

e MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

f Massachusetts Institute of Technology Cambridge (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPACITIVE SENSORS; CHEMICAL VAPOR DEPOSITION; MEMBRANES; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS; Q FACTOR MEASUREMENT; SUBSTRATES;

CAPACITIVE PRESSURE SENSORS; CHEMICAL VAPOR DEPOSITION METHODS; ELASTIC MECHANICAL PROPERTIES; ENHANCED CARRIER MOBILITY; HYDROGEN BUBBLING; INTRINSIC FEATURES; SOLVENT REPLACEMENTS; SUSPENDED GRAPHENE;

GRAPHENE;

EID: 84957704899 PISSN: 20403364 EISSN: 20403372 Source Type: Journal
DOI: 10.1039/c5nr08668j Document Type: Article

Times cited : (122)

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