Graphene growth by CVD methods

Graphene Nanoelectronics: From Materials to Circuits

Volumn 9781461405481, Issue , 2012, Pages 167-203

  Reina, Alfonso ^a   Kong, Jing ^a  

^a Department of Electrical Engineering and Computer Science   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; GRAPHENE; MICROELECTRONICS;

CHEMICAL VAPOR DEPOSITION METHODS; CHEMICAL VAPOUR DEPOSITION; CONDENSED PHASE; CONDENSED PHASIS; GAS-PHASES; GRAPHENE GROWTH; IN-PROCESS; MICROELECTRONIC INDUSTRY; TARGET SURFACE; THIN-FILMS;

CHEMICAL VAPOR DEPOSITION;

EID: 84949178690     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-1-4614-0548-1_7     Document Type: Chapter

References (55)

1. J. Wintterlin and M. L. Bocquet. Graphene on metal surfaces. Surface Science, 603 (10-12):1841-1852, 2009.
2. A. E. B. Presland and P. L. Walker. Growth of single-crystal graphite by pyrolysis of acetylene over metals. Carbon, 7(1):1-4, 1969.
3. Alexander E. Karu and Michael Beer. Pyrolytic formation of highly crystalline graphite films. Journal of Applied Physics, 37(5):2179-2181, 1966.
4. P. E. I. Ching Li. Preparation of single-crystal graphite from melts. Nature, 192 (4805):864-865, 1961.
5. I. Minko and I. Einbinder. Dendritic growth of graphite from melts. Nature, 194 (4830):765-766, 1962.
6. S. B. Austerman, S. M. Myron, and J. W. Wagner. Growth and characterization of graphite single crystals. Carbon, 5(6), 1967.
7. Peter W. Sutter, Jan-Ingo Flege, and Eli A. Sutter. Epitaxial Graphene on Ruthenium. Nat Mater, 7(5):406-411, 2008.
8. Keun Soo Kim, Yue Zhao, Houk Jang, Sang Yoon Lee, Jong Min Kim, KS Kim, Jong Ahn, Philip Kim, Jae Choi, Byung Hee Hong. Large-scale pattern growth of graphene films for stretchable transparent electrodes. Nature, 457(7230):706-710, 2009.
9. Qingkai Yu, Jie Lian, Sujitra Siriponglert, Hao Li, Yong P. Chen, and Shin-Shem Pei. Graphene segregated on Ni surfaces and transferred to insulators. Applied Physics Letters, 93(11):113103-3, 2008.
10. L. G. De Arco, Zhang Yi, A. Kumar, and Zhou Chongwu. Synthesis, transfer, and devices of single- and few-layer graphene by chemical vapor deposition. Nanotechnology, IEEE Transactions on, 8(2):135-138, 2009.
11. Alfonso Reina, Xiaoting Jia, John Ho, Daniel Nezich, Hyungbin Son, Vladimir Bulovic, Mildred S. Dresselhaus, and Jing Kong. Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Letters, 9(1):30-35, 2009.
12. E. Sutter, P. Albrecht, and P. Sutter. Graphene growth on polycrystalline Ru thin films. Applied Physics Letters, 95(13):133109, 2009.
13. P. W. Sutter, P. M. Albrecht, and E. A. Sutter. Graphene growth on epitaxial Ru thin films on sapphire. Applied Physics Letters, 97(21):213101, 2010.
14. S. D. Robertson. Carbon Formation from Methane Pyrolysis over some Tran-sition Metal surfaces-II. Manner of carbon and graphite formation. Carbon, 10(2):221-229, 1972.
15. Alfonso Reina, Stefan Thiele, Xiaoting Jia, Sreekar Bhaviripudi, Mildred Dressel-haus, Juergen Schaefer, and Jing Kong. Growth of large-Area single- and bi-layer graphene by controlled carbon precipitation on polycrystalline Ni surfaces. Nano Research, 2(6): 509-516, 2009.
16. Stefan Thiele, Alfonso Reina, Paul Healey, Jakub Kedzierski, Peter Wyatt, Pei-Lan Hsu, Craig Keast, Juergen Schaefer, and Jing Kong. Engineering polycrys-talline Ni films to improve thickness uniformity of the chemical-vapor-deposition-grown graphene films. Nanotechnology, 21(1):015601, 2009.
17. B. C. Banerjee, T. J. Hirt, and P. L. Walker. Pyrolytic carbon formation from carbon suboxide. Nature, 192(4801):450-451, 1961.
18. A. R. Ubbelohde, D. A. Young, and A. W. Moore. Annealing of pyrolytic graphite under pressure. Nature, 198(4886):1192-1193, 1963.
19. F. J. Derbyshire, A. E. B. Presland, and D. L. Trimm. The formation of graphite films by precipitation of carbon from nickel foils. Carbon, 10(1):114, 1972.
20. F. J. Derbyshire, A. E. B. Presland, and D. L. Trimm. Graphite formation by the dissolutionprecipitation of carbon in cobalt, nickel and iron. Carbon, 13(2):111-113, 1975.
21. Masako Yudasaka, Rie Kikuchi, Takeo Matsui, Yoshimasa Ohki, Mark Baxen-dale, Susumu Yoshimura, and Etsuro Ota. Graphite formation on Ni film by chemical vapor deposition. Thin Solid Films, 280(1-2):117-123, 1996.
22. Yudasaka Masako, Kikuchi Rie, Ohki Yoshimasa, and Yoshimura Susumu. Graphite growth influenced by crystallographic faces of Ni films. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, 16(4):2463-2465, 1998.
23. A. N. Obraztsov, E. A. Obraztsova, A. V. Tyurnina, and A. A. Zolotukhin. Chemical vapor deposition of thin graphite films of nanometer thickness. Carbon, 45(10):2017-2021, 2007.
24. M. Yudasaka, R. Kikuchi, T.Matsui, H. Kamo, Y. Ohki, S. Yoshimura, and E. Ota. Graphite thin film formation by chemical vapor deposition. Applied Physics Letters, 64(7):842-844, 1994.
25. A. Nagashima, N. Tejima, and C. Oshima. Electronic states of the pristine and alkali-metalintercalated monolayer graphite/Ni(111) systems. Physical Review B, 50(23):17487, 1994.
26. Y. Gamo, A. Nagashima, M. Wakabayashi, M. Terai, and C. Oshima. Atomic structure of monolayer graphite formed on Ni(111). Surface Science, 374(1-3):61-64, 1997.
27. D. Farias, A. M. Shikin, K. H. Rieder, and S. Dedkov Yu. Synthesis of a weakly bonded graphite monolayer on Ni(111) by intercalation of silver. Journal of Physics: Condensed Matter, (43):8453, 1999.
28. Elena Loginova, Norman C. Bartelt, Peter J. Feibelman, and Kevin F. McCarty. Evidence for graphene growth by c cluster attachment. New Journal of Physics, 10(9):093026, 2008.
29. Xuesong Li, Weiwei Cai, Jinho An, Seyoung Kom, Junghyo Na, Dongxing Yang, Richard Piner, Aruna Velamakanni, Inhwa Jung, Emanuel Tutuc, Sanjay K. Banerjee, Luigi Colombo, and Rodney S. Ruoff. Large-Area synthesis of high-quality and uniform graphene films on Copper foils. Science 324 (5932): 1312-1314, 2009.
30. Xuesong Li, Weiwei Cai, Luigi Colombo, and Rodney S. Ruoff. Evolution of graphene growth on Ni and Cu by carbon isotope labeling. Nano Letters, 9(12):4268-4272, 2009.
31. Liying Jiao, Ben Fan, Xiaojun Xian, Zhongyun Wu, Jin Zhang, and Zhongfan Liu. Creation of nanostructures with poly(methyl methacrylate)-mediated nan-otransfer printing. Journal of the American Chemical Society, 130(38):12612-12613, 2008.
32. Sukang Bae, Hyeongkeun Kim, Youngbin Lee, Xiangfan Xu, Jae-Sung Park, Yi Zheng, Jayakumar Balakrishnan, Tian Lei, Hye Ri Kim, Young Il Song, Young-Jin Kim, Kwang S. Kim, Barbaros Ozyilmaz, Jong-Hyun Ahn, Byung Hee Hong, and Sumio Iijima. Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nat Nano, 5(8):574-578, 2010.
33. Mark P. Levendorf, Carlos S. Ruiz-Vargas, Shivank Garg, and Jiwoong Park. Transfer-free batch fabrication of single layer graphene transistors. Nano Letters, 9(12):4479-4483, 2009.
34. Xuesong Li, Carl W. Magnuson, Archana Venugopal, Jinho An, Ji Won Suk, Boyang Han, Mark Borysiak, Weiwei Cai, Aruna Velamakanni, Yanwu Zhu, Lianfeng Fu, Eric M. Vogel, Edgar Voelkl, Luigi Colombo, and Rodney S. Ruo . Graphene films with large domain size by a two-step chemical vapor deposition process. Nano Letters, 10(11):4328-4334, 2010.
35. Qingkai Yu, Luis A. Jauregui, Wei Wu, Robert Colby, Jifa Tian, Zhihua Su, Helin Cao, Zhihong Liu, Deepak Pandey, Dongguang Wei, Ting Fung Chung, Peng Peng, Nathan P. Guisinger, Eric A. Stach, Jiming Bao, Shin-Shem Pei &Yong P. Chen. Control and characterization of individual grains and grain boundaries in graphene grown by chemical vapour deposition. Nature Materials, 10: 443-449. 2011.
36. Sreekar Bhaviripudi, Xiaoting Jia, Mildred S. Dresselhaus, and Jing Kong. Role of kinetic factors in chemical vapor deposition synthesis of uniform large area graphene using copper catalyst. Nano Letters, 10(10):4128-4133, 2010.
37. Melinda Y. Han, Barbaros Ozyilmaz, Yuanbo Zhang, and Philip Kim. Energy band-gap engineering of graphene nanoribbons. Physical Review Letters, 98(20):206805, 2007.
38. Yu-Ming Lin, Vasili Perebeinos, Zhihong Chen, and Phaedon Avouris. Electrical observation of subband formation in graphene nanoribbons. Physical Review B, 78(16):161409, 2008.
39. S. Y. Zhou, G. H. Gweon, A. V. Fedorov, P. N. First, W. A. de Heer, D. H. Lee, F. Guinea, A. H. Castro Neto, and A. Lanzara. Substrate-induced bandgap opening in epitaxial graphene. Nat Mater, 6(10):770-775, 2007.
40. Yuanbo Zhang, Tsung-Ta Tang, Caglar Girit, Zhao Hao, Michael C. Martin, Alex Zettl, Michael F. Crommie, Y. Ron Shen, and Feng Wang. Direct observation of a widely tunable bandgap in bilayer graphene. Nature, 459(7248):820-823, 2009.
41. Seunghyun Lee, Kyunghoon Lee, and Zhaohui Zhong. Wafer scale homogeneous bilayer graphene films by chemical vapor deposition. Nano Letters, 10(11):4702-4707, 2010.
42. Xuesong Li, Weiwei Cai, Jinho An, Seyoung Kim, Junghyo Nah, Dongxing Yang, Richard Piner, Aruna Velamakanni, Inhwa Jung, Emanuel Tutuc, Sanjay K. Banerjee, Luigi Colombo, and Rodney S. Ruo . Large-Area synthesis of high-quality and uniform graphene films on copper foils. Science, 324(5932):1312-1314, 2009.
43. Takayuki Iwasaki, Hye Jin Park, Mitsuharu Konuma, Dong Su Lee, Jurgen H. Smet, and Ulrich Starke. Long-range ordered single-crystal graphene on high-quality heteroepitaxial Ni thin films grown on MgO(111). Nano Letters 11 (1): 79-84, 2011.
44. Kongara M. Reddy, Andrew D. Gledhill, Chun-Hu Chen, Julie M. Drexler, and Nitin P. Padture. High quality, transferable graphene grown on single crystal Cu(111) thin films on basal-plane sapphire. Applied Physics Letters 98: 113117, 2011.
45. Li Gao, Je rey R. Guest, and Nathan P. Guisinger. Epitaxial graphene on Cu(111). Nano Letters, 10(9):3512-3516, 2010.
46. M. Eizenberg and J. M. Blakely. Carbon monolayer phase condensation on Ni (111). Surface Science, 82; 228-236, 1979.
47. W.W. Dunn, R.B. McLellan, and W.A. Oates. Segregation isosteres for carbon at the (100) surface of nickel. Trans. AIME, 242:2129, 1968.
48. Archana Venugopal-Eric M. Vogel Rodney S. Ruo Luigi Colombo Xuesong Li, Carl W. Magnuson. Large domain graphene. arXiv:1010.3903v1, 2010.
49. Chae Seung Jin, Gne Fethullah, scedil, Kim Ki Kang, Kim Eun Sung, Han Gang Hee, Kim Soo Min, Shin Hyeon-Jin, Yoon Seon-Mi, Choi Jae-Young, Park Min Ho, Yang Cheol Woong, Pribat Didier, and Lee Young Hee. Synthesis of large-Area graphene layers on poly-Nickel substrate by chemical vapor deposition: Wrinkle formation. Advanced Materials, 21 (22):2328-2333, 2009.
50. Lianchang Zhang, Zhiwen Shi, Yi Wang, Rong Yang, Dongxia Shi, and Guangyu Zhang. Catalyst-free growth of nanographene films on various substrates. Nano Research 4(3): 315-321, 2011.
51. Mark H. Rummeli, Alicja Bachmatiuk, Andrew Scott, Felix Borrnert, Jamie H. Warner, Volker Ho man, Jarrn-Horng Lin, Gianaurelio Cuniberti, and Bernd Buchner. Direct lowtemperature nanographene CVD synthesis over a dielectric insulator. ACS Nano, 4(7): 4206-4210, 2010.
52. Nai Gui Shang, Pagona Papakonstantinou, Martin McMullan, Ming Chu, Artemis Stamboulis, Alessandro Potenza, Sarnjeet S. Dhesi, and Helder Marchetto. Catalyst-free efficient growth, orientation and biosensing proper-ties of multilayer graphene nano flake films with sharp edge planes. Advanced Functional Materials, 18(21):3506-3514, 2008.
53. J. J. Wang, M. Y. Zhu, R. A. Outlaw, X. Zhao, D. M. Manos, B. C. Holloway, and V. P. Mammana. Free-standing subnanometer graphite sheets. Applied Physics Letters, 85(7):1265-1267, 2004.
54. Albert Dato, Velimir Radmilovic, Zonghoon Lee, Jonathan Phillips, and Michael Frenklach. Substrate-free gas-phase synthesis of graphene sheets. Nano Letters, 8(7):2012-2016, 2008.
55. Xianbao Wang, Haijun You, Fangming Liu, Mingjian Li, Li Wan, Shaoqing Li, Qin Li, Yang Xu, Rong Tian, Ziyong Yu, Dong Xiang, and Jing Cheng. Large-scale synthesis of few-layered graphene using CVD. Chemical Vapor Deposition, 15(1-3):53-56, 2009.