Reliability test and failure analysis of optical MEMS

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn 2002-January, Issue , 2002, Pages 201-206

  Durr P ^a   Dauderstadt U ^a   Kunze, D ^a   Auvert, M ^a   Lakner, H ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Failure analysis; Laser modes; Life testing; Microelectromechanical devices; Micromechanical devices; Optical design; Optical devices; Optical modulation; System testing; Writing

Indexed keywords

INTEGRATED CIRCUITS; LASER MIRRORS; LASER MODES; LIGHT MODULATION; LIGHT MODULATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; MODULATION; MOEMS; OPTICAL DESIGN; OPTICAL DEVICES; PIXELS; RELIABILITY ANALYSIS; SURFACE DEFECTS; TECHNICAL WRITING;

EXPERIMENTAL REALIZATIONS; LIFE-TESTING; MICROMECHANICAL DEVICE; REFLECTING SURFACE; SMALL-VOLUME PRODUCTION; SPATIAL LIGHT MODULATION; SYSTEM TESTING; ULTRAVIOLET LIGHTS;

FAILURE ANALYSIS;

EID: 84948744452     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2002.1025660     Document Type: Conference Paper

References (10)

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