Nucleation and growth of ultrathin BaTiO3 films on single terminated Nb:SrTiO3 (100) substrates for ferroelectric tunnel junctions

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

Volumn 34, Issue 2, 2016, Pages

  Ambriz Vargas, Fabian ^a   Velasco Davalos, Ivan ^a   Thomas, Reji ^a   Ruediger, Andreas ^a  

^a INSTITUT NATIONAL DE LA RECHERCHE SCIENTIFIQUE   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; FERROELECTRIC FILMS; FERROELECTRICITY; MAGNETRON SPUTTERING; SCANNING PROBE MICROSCOPY; SPUTTER DEPOSITION; STRONTIUM TITANATES; TUNNEL JUNCTIONS; ULTRATHIN FILMS;

BARIUM TITANATE THIN FILMS; FERROELECTRIC TUNNEL JUNCTIONS; NUCLEATION AND GROWTH; PIEZORESPONSE FORCE MICROSCOPY; PROCESSING PRESSURE; RADIO FREQUENCY MAGNETRON SPUTTERING; SEMICONDUCTING SUBSTRATES; SILICON SUBSTRATES;

SUBSTRATES;

EID: 84945971357     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.4934647     Document Type: Article

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