Laser microfabrication using nano-particles dispersed polymer resist

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 762-765

  Yagyu, H ^a   Hayashi, S ^a   Tabata, O ^b  

^a Limited   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Absorption; Controllability; Gold; Instruments; Laser beams; Microstructure; Polymers; Power lasers; Resists; Shape control

Indexed keywords

ABSORPTION; ACTUATORS; AGGLOMERATION; ASPECT RATIO; CONTROLLABILITY; GOLD; INSTRUMENTS; LASER BEAMS; MICROANALYSIS; MICROFABRICATION; MICROSTRUCTURE; MICROSYSTEMS; NANOPARTICLES; NANOSENSORS; POLYMERS; TRANSDUCERS;

CROSS-SECTIONAL SHAPE; DISPERSED POLYMERS; HIGH ASPECT RATIO MICROSTRUCTURES; LASER MICRO-FABRICATION; POWER LASERS; RESISTS; SHAPE CONTROL; STRONG ABSORPTIONS;

SOLID-STATE SENSORS;

EID: 84944720331     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215585     Document Type: Conference Paper

References (16)

1. M. Ueda, O. Tabata, Y. Baba: "Development of Microfabricatd Chapillariy Array Electorophoresis Chip and Direct Observation of Dynamics of DNA Molecules Migrating in Microchannels", Trans. IEE of Japan, Vol. 119-E No.10, pp.460-463 (1999)
2. O. V. Makarova, Cha-Mei Tang, D. C. Mancini, N. Moldovan: "Microfabrication of freestanding metal structures released from graphite substrates", in Proc. IEEE Int. Conf. Micro Electro Mechanical Systems, Las Vegas, Jan. 2002, pp.400-402.
3. S. K. Lee, K. C. Lee, and S. S. Lee: "Microfabrication by the modified LIGA process", in Proc. IEEE Int. Conf. Micro Electro Mechanical Systems, Las Vegas, Jan. 2002, pp.520-523.
4. Y. Yokoyam, H. Ohta, M. Takeda, T. Ohara, T. Araki: "Fabrication process of micro bonding elements with taper shape", Trans. IEE Japan, Vol. 122-E, No.2, pp.90-95 (2002)
5. P. J. Slikkerveer, P. C. P. Bouten, F. C. M. de Haas: "High quality mechanical etching of brittle materials by powder blasting", 85, pp.296-303 (2000)
6. N. Matsuzuka, T. Yamaji, S. Uemura, O. Tabata, K. Yamamoto: "3D fabrication by moving mask deep X-ray lithography with multiple stage", in Proc. IEEE Int. Conf. Micro Electro Mechanical Systems, Las Vegas, Jan. 2002, pp.180-183.
7. M. Han, W. Lee, and S. S. Lee: "Fabrication of 3D microstructures with inclined/rotated UV lithography", in Proc. IEEE Int. Conf. Micro Electro Mechanical Systems, Kyoto, Jan. 2003, pp.554-557.
8. G. Chryssoluris: Laser machining, Springer-Verlag (1991)
9. A. P. Hui, S. J. Qin, W. J. Li, and M. Y. Wong: "High aspect ratio nano fulidicc channels by laser-controlled fracturing", in Proc. IEEE Int. Conf. Micro Electro Mechanical Systems, Las Vegas, Jan. 2002, pp156-159.
10. A. Slocombe, L. Li: "Laser ablation machining of metal/polymer composite materials", Appl Surface science, 154-155, pp.617-621, (2000)
11. E. K. Illy, D. J. Brown, M. J. Wiyhford and J. A. Piper: "Optimization of trepanning strategies for micromachining of polymers with high-pulse-rate UV lasers", in Proc. SPIE Int. Soc. Opt. Eng., 2000, pp. 608-616.
12. A. Salleo, T. Sands, F. Y. Genin: "machining of transparent materials using an IR and UV nanosecond pulse laser", Appl. Phys., A71, pp. 601-608 (2000)
13. H. Yagyu, S. Hasyashi, O. Tabata: "Dependency on Au concentration in laser micromachining of gold nano-particles dispersed polymer", The paper of technical meeting on micromachine and sensor system, IEE Japan, 2003, pp.1-6.
14. M. M. Alvarez, J. T. Khoury, T. G. Schaaff, M. N. Shafigullin, I. Vezmar, and R. L.Whetten: "Optical Absorption Spectra of nanocrystal gold molecules", J. Phys. Chem. B, 101, pp.3706-3712 (1997)
15. M.Lax: "Temperature rise Induced by a laser beam", J: Appl. Phys.Vol.48, No..9, pp.3919-3924 (1977)
16. A. E. Powers: Conductivity in aggregates, AEC-Report KAPL-2145, pp.1-29, Office of Technical Services U. S. Dept. Commerce, (1961)