A poly-Si thermoelectric cooling device fabricated by surface micromachining technology

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1084-1087

  Lin, Ching ^a   Chen, H J H ^a   Huang, I Yu ^a   Huang, S R S ^a,b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

Author keywords

Bridge circuits; CMOS technology; Electronics cooling; Fabrication; Microelectronics; Micromachining; Monolithic integrated circuits; Tellurium; Thermoelectric devices; Thermoelectricity

Indexed keywords

ACTUATORS; BRIDGE CIRCUITS; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; COOLING; FABRICATION; MICROELECTRONICS; MICROMACHINING; MICROSYSTEMS; MONOLITHIC INTEGRATED CIRCUITS; PELTIER EFFECT; POLYCRYSTALLINE MATERIALS; SOLID-STATE SENSORS; SURFACE MICROMACHINING; TELLURIUM; TELLURIUM COMPOUNDS; THERMOELECTRICITY; TRANSDUCERS;

CMOS TECHNOLOGY; ELECTRONICS COOLING; SACRIFICIAL OXIDE; SURFACE MICROMACHINING TECHNOLOGY; SURROUNDING ENVIRONMENT; THERMAL CONDUCTION; THERMOELECTRIC COOLING DEVICES; THERMOELECTRIC DEVICES;

ELECTRONIC COOLING;

EID: 84944714876     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216957     Document Type: Conference Paper

References (10)

1. th Int. Conf. On Thermoelectrics, pp. 117-122, 1999.
2. th Int. Conf. On Thermoelectrics, pp. 551-554, 1997.
3. th Int. Conf. On Thermoelectrics, pp. 646-649, 1997.
4. D. D. L. Wijngaard, S. H. Kong, M. Bartek, and R. F. Wolffenbuttel, "Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices," Sensors and Actuators 85, 316-323 (2000).
5. Gao Min, D. M. Rowe and F. Volklein, "Integrated Thin Film Thermoelectric Cooler," IEE Electronics Letters, 34, 222-223 (1998).
6. th Int. Conf. On Thermoelectrics, pp. 27-30, 1999.
7. th Int. Conf. On Thermoelectrics, pp. 405-408, 2001.
8. Marc Strasser, Robert Aigner, Martin Franosch, and Gerhard Wachutka, "Miniature thermoelectric generators based on poly-Si and poly-SiGe surface micromachining," Transducer '01 Eurosensors XV (2001).
9. F Volklein, Gao Min, D. M. Rowe, "Modelling of a Microelectromechanical Thermoelectric Cooler," Sensors and Actuators, 75, 95-101 (1999)
10. X. C. Xuan, K. C. Ng, C. Yap, H. T. Chua, "The maximum Temperature Difference and Polar Characteristic of Two-Stage Thermoelectric Coolers," Cryogenics, 42, 273-278 (2002).