Micro thermoelectric coolers for integrated applications

International Conference on Thermoelectrics, ICT, Proceedings

Volumn , Issue , 1997, Pages 646-649

  Rushing, Lance ^a   Shakouri, Ali ^a   Abraham, Patrick ^a   Bowers, John E ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EVAPORATION; INTEGRATED CIRCUITS; METALLIZING; PHOTOLITHOGRAPHY; SEMICONDUCTING BISMUTH COMPOUNDS; THERMOCOUPLES;

BISMUTH TELLURIDE; MICROTHERMOELECTRIC COOLERS; SCALING LAWS;

THERMOELECTRIC EQUIPMENT;

EID: 0031370322     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)