Sidewall silicon carbide emitters for terahertz vacuum electronics

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2012, Pages 336-338

  Snapp, J P ^a   Lee, J H ^a   Provine, J ^a   Bargatin, I ^a   Maboudian, R ^b   Lee, T H ^a   Howe, R T ^a  

^a STANFORD UNIVERSITY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; MICROSYSTEMS; SILICON CARBIDE; THERMIONIC EMISSION; THICK FILMS; VACUUM TECHNOLOGY;

HEATING POWER; HIGH ASPECT RATIO; LOW STRESS; RESISTIVELY HEATED; SILICON TRENCH; THERMIONIC CURRENTS; THERMIONIC EMITTERS; VACUUM ELECTRONICS;

SOLID-STATE SENSORS;

EID: 84944677325     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2012.89     Document Type: Conference Paper

References (9)

1. T. Crowe, W. Bishop, D. Porterfield, J. Hesler, and R. I. Weikle, "Opening the terahertz window with integrated diode circuits," IEEE Journal of Solid-State Circuits, vol. 40, pp. 2104-2110, 2005.
2. T.H. Lee, "The Return of the Empty State: Vacuum Nanoelectronics for Terahertz Applications," International Test Conference (ITC), Austin, TX, Oct. 31-Nov. 5, 2010.
3. R.T. Howe, "Vacuum microsystems for energy conversion and other applications," Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International, vol., no., pp. 7-11, June 5-9, 2011.
4. E. Boone, M. Uenohara, and D. Davis, "A Barkhausen-Kurz oscillator at centimeter wavelengths," IEEE Trans. on Electron Devices, vol. 5, pp. 196-205, 1958.
5. J.-H. Lee, I. Bargatin, J. Provine, F. Liu, M.-K. Seo, R. Maboudian, M.L.L. Brongersma, N.A. Melosh, Z.X. Shen, R. T. Howe, "Effect of illlumination on thermionic emission from microfabricated silicon carbide structures," Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International, vol., no., pp. 2658-2661, June 5-9, 2011.
6. O. Kwon, et al, "Micro-fabricated millimeter wave vacuum electronic devices," 35th Int. Conf. on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2010.
7. F. Liu, C. Carraro, A.P. Pisano, R. Maboudian, "Characterization of Nitrogen-doped Polycrystalline 3C-SiC Thin Films Deposited from Methylsilane for Harsh Environment MEMS Application", Journal of Micromechanics and Microengineering 20, 35011-35014 (2010).
8. D. Gao, M.B.J. Wijesundara, C. Carraro, R.T. Howe, R. Maboudian, "Recent progress toward a manufacturable polycrystalline SiC surface micromachining technology," Sensors Journal, IEEE, vol. 4, no. 4, pp. 441-448, Aug. 2004.
9. J.-H. Lee, I. Bargatin, K. Iwami, K. A. Littau, M. Vincent, R. Maboudian, Z.-X. Shen, N. A. Melosh, R. T. Howe, "Encapsulated Thermionic Energy Converter With Stiffened Suspension", 2012 Solid-State Sensor and Actuator Workshop, Hilton Head Isl., SC, June 3-7, 2012.