Micro-fabricated millimeter wave vacuum electronic devices

IRMMW-THz 2010 - 35th International Conference on Infrared, Millimeter, and Terahertz Waves, Conference Guide

Volumn , Issue , 2010, Pages

  Kwon, Ohjoon ^a   So, Jin Kyu ^a   Srivastava, Anurag ^a   Sattorov, Matlabjon ^a   Barik, Ranjan Kumar ^a   Bera, Anirban ^a   Tanwar, Anil Kumar ^a   Park, Seung Hyuk ^a   Baik, In Keun ^a   Choi, Jun Ho ^b   Kim, Junyeon ^b   Yang, Jong Won ^b   Kim, Jong Hyun ^c   Chang, Suk Sang ^c   Park, Gun Sik ^a  

^a Seoul National University   (South Korea)

^b Agency for Defence Development   (South Korea)

^c POSTECH   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BACKWARD WAVE OSCILLATOR; COUPLED CAVITY; HOT TEST; VACUUM ELECTRONIC DEVICES;

MICROWAVE OSCILLATORS; MILLIMETER WAVE DEVICES; PLASMA OSCILLATIONS;

TERAHERTZ WAVES;

EID: 78649358951     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIMW.2010.5612980     Document Type: Conference Paper

References (9)

1. J. M. Hruby. (2001, Apr.) LIGA technologies and applications. MRS Bull. [Online], pp. 1 - 4. Available: http://www.ca.sandia.gov/liga/process-archieves. html.
2. Y.M. Shin, L.R. Barnett, D. Gamzina, N.C. Luhmann, Jr. M. Field, and R. Borwick, "Terahertz vacuum electronic circuits fabricated by UV lithographic molding and deep reactive ion etching" Appl. Phys. Lett. Vol. 95, No. 18, 181505, Nov. 2009.
3. G. Scheitrum, G.Caryotakis, A. Haase, B. Arfin, C. Pearson, L. Song, N. Luhmann, B. James, B. Shew, and Y. Cheng, "95GHz klystron design and fabrication", in Mulidisciplinary University Research Initiative Teleconf., Oct. 2000.
4. S.T. Han, "Low-Voltage operation of Ka-band folded waveguide travelling-wave tube", IEEE Trans. Plas. Sci., Vol. 32, pp. 60-66, Feb. 2004.
5. S. T. Han, J. K. So, K. H. Jang, Y. M. Shin, J. H. Kim, S. S. Chang, N. M. Ryskin, and G. S. Park, "Investigations on a Micro-Fabricated Folded Waveguide Traveling-Wave Tube Oscillator", IEEE Trans. Elec. Dev., Vol. 52, Issue 5, 702, May 2005.
6. S. T. Han, S. G. Jeon, Y. M. Shin, K. H. Jang, J. K. So, J. H. Kim, S. S. Chang, and G. S. Park, "Experimental Investigations on Miniaturized High Frequency Vacuum Electron Devices", IEEE Trans. Plas. Sci., Vol. 33, Issue 2, 679, April 2005.
7. Y. M. Shin, G. S. Park, G. P. Scheitrum, and B. Arfin, "Novel coupled-cavity TWT structure using two-step LIGA fabrication", IEEE Plas. Sci., Vol. 31, Issue 6, 1317, Dec. 2003.
8. Y. M. Shin, J. K. So, J. H. Kim, S. T. Han, K. H. Jang, S. S. Chang, and G. S. Park, "Microfabrication of Millimeter wave vacuum electron devices by two-step deep etch x-ray lithography," Appl. Phys. Lett., Vol. 88, No. 9, 091916, Feb. 2006.
9. Zhang Kai-Chun, Wu Zhen-Hua, and Liu Sheng-Gang, "Study of a rectangular coupled cavity extended interaction oscillator in sub-terahertz waves", Chi. Phys. B. Vol 17 No 9, 1674-1056 September 2008.