Direct Immersion Annealing of Thin Block Copolymer Films

ACS Applied Materials and Interfaces

Volumn 7, Issue 39, 2015, Pages 21639-21645

  Modi, Arvind ^a   Bhaway, Sarang M ^a   Vogt, Bryan D ^a   Douglas, Jack F ^c   Al Enizi, Abdullah ^d   Elzatahry, Ahmed ^e   Sharma, Ashutosh ^b   Karim, Alamgir ^a  

^a University of Akron   (United States)

^b INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^d KING SAUD UNIVERSITY   (Saudi Arabia)

^e Qatar University   (Qatar)

Author keywords

block copolymer ordering; direct immersion annealing; kinetics; mixed solvents

Indexed keywords

ACTIVATION ENERGY; ANNEALING; BATCH DATA PROCESSING; ENZYME KINETICS; ESTERS; GRAIN GROWTH; POLYMER FILMS; SOLVENTS;

BLOCK COPOLYMER FILMS; BLOCK-COPOLYMER ORDERING; DIRECT IMMERSIONS; MIXED SOLVENT; POLYSTYRENE-POLY(METHYL METHACRYLATE) (PS-PMMA); SHORT RANGE ORDERING; SOLVENT COMPOSITION; SOLVENT-VAPOR ANNEALING;

BLOCK COPOLYMERS;

EID: 84944088474     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/acsami.5b06259     Document Type: Article

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