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Volumn 6, Issue 9, 2012, Pages 8342-8348

Square arrays of holes and dots patterned from a linear ABC triblock terpolymer

Author keywords

block copolymer; nanolithography; self assembly; solvent vapor annealing; square pattern; triblock terpolymer

Indexed keywords

ABC TRIBLOCK; BLOCK COPOLYMER LITHOGRAPHY; CHLOROFORM VAPOR; HOLE PATTERNS; NANO SCALE; PATTERN TRANSFERS; POLYFERROCENYLSILANES; SILICON SUBSTRATES; SOLVENT ANNEALING; SOLVENT VAPORS; SQUARE ARRAY; SQUARE PATTERNS; TRIBLOCK TERPOLYMERS;

EID: 84866642668     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn303085k     Document Type: Article
Times cited : (36)

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