The Use of Shape Memory Polymers for MEMS Assembly

Journal of Microelectromechanical Systems

Volumn 25, Issue 1, 2016, Pages 69-77

  Eisenhaure, Jeffrey D ^a   Rhee, Sang Il ^a   Al Okaily, Ala'A M ^a   Carlson, Andrew ^b   Ferreira, Placid M ^a   Kim, Seok ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

dry adhesives; microassembly; reversible adhesion; Shape memory polymer; transfer printing

Indexed keywords

ADHESION; GLASS TRANSITION; MICROMOTORS; POLYMERS; RIGIDITY;

BUILDING BLOCKES; COMPLEX SURFACE; DYNAMIC RIGIDITY; HETEROGENEOUS SURFACE; MICRO-SCALE OBJECT; RECOVERY PROPERTIES; SHAPE MEMORY POLYMERS; TRANSFER PRINTING;

SHAPE MEMORY EFFECT;

EID: 84943616646     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2015.2482361     Document Type: Article

References (32)

1. S. M. Spearing, "Materials issues in microelectromechanical systems (MEMS), " Acta Mater., vol. 48, no. 1, pp. 179-196, Jan. 2000.
2. Y. Zhang, B. K. Chen, X. Liu, and Y. Sun, "Autonomous robotic pick-and-place of microobjects, " IEEE Trans. Robot., vol. 26, no. 1, pp. 200-207, Feb. 2010.
3. H. T. Miyazaki, Y. Tomizawa, S. Saito, T. Sato, and N. Shinya, "Adhesion of micrometer-sized polymer particles under a scanning electron microscope, " J. Appl. Phys., vol. 88, no. 6, pp. 3330-3340, Sep. 2000.
4. D. S. Haliyo and S. Regnier, "Advanced applications using [mu]MAD, the adhesion based dynamic micro-manipulator, " in Proc. IEEE/ASME Int. Conf. Adv. Intell. Mechatron. (AIM), vol. 2. Jul. 2003, pp. 880-885.
5. N. Dechev, W. L. Cleghorn, and J. K. Mills, "Microassembly of 3-D microstructures using a compliant, passive microgripper, " J. Microelectromech. Syst., vol. 13, no. 2, pp. 176-189, Apr. 2004.
6. S. Saito and M. Sonoda, "Non-impact deposition for electrostatic micromanipulation of a conductive particle by a single probe, " J. Micromech. Microeng., vol. 18, no. 10, p. 107001, Oct. 2008.
7. O. Fuchiwaki, A. Ito, D. Misaki, and H. Aoyama, "Multi-axial micromanipulation organized by versatile micro robots and micro tweezers, " in Proc. IEEE Int. Conf. Robot. Autom. (ICRA), May 2008, pp. 893-898.
8. M. A. Meitl et al., "Transfer printing by kinetic control of adhesion to an elastomeric stamp, " Nature Mater., vol. 5, no. 1, pp. 33-38, Jan. 2006.
9. S. Kim et al., "Microstructured elastomeric surfaces with reversible adhesion and examples of their use in deterministic assembly by transfer printing, " Proc. Nat. Acad. Sci. USA, vol. 107, no. 40, pp. 17095-17100, Oct. 2010.
10. A. Carlson et al., "Shear-enhanced adhesiveless transfer printing for use in deterministic materials assembly, " Appl. Phys. Lett., vol. 98, no. 26, p. 264104, Jun. 2011.
11. S. Y. Yang et al., "Elastomer surfaces with directionally dependent adhesion strength and their use in transfer printing with continuous roll-to-roll applications, " Adv. Mater., vol. 24, no. 16, pp. 2117-2122, Apr. 2012.
12. R. Saeidpourazar et al., "Laser-driven micro transfer placement of prefabricated microstructures, " J. Microelectromech. Syst., vol. 21, no. 5, pp. 1049-1058, Oct. 2012.
13. A. Carlson, S. Wang, P. Elvikis, P. M. Ferreira, Y. Huang, and J. A. Rogers, "Active, programmable elastomeric surfaces with tunable adhesion for deterministic assembly by transfer printing, " Adv. Funct. Mater., vol. 22, no. 21, pp. 4476-4484, Nov. 2012.
14. Y. Yang et al., "Microcontact printing: Arrays of silicon micro/nanostructures formed in suspended configurations for deterministic assembly using flat and roller-type stamps (small 4/2011), " Small, vol. 7, no. 4, p. 417, Feb. 2011.
15. J. D. Eisenhaure, S. I. Rhee, A. M. Al-Okaily, A. Carlson, P. M. Ferreira, and S. Kim, "The use of shape memory polymers for microassembly by transfer printing, " J. Microelectromech. Syst., vol. 23, no. 5, pp. 1012-1014, Oct. 2014.
16. T. Xie, "Recent advances in polymer shape memory, " Polymer, vol. 52, no. 22, pp. 4985-5000, Oct. 2011.
17. C. Liu, H. Qin, and P. T. Mather, "Review of progress in shape-memory polymers, " J. Mater. Chem., vol. 17, no. 16, pp. 1543-1558, Apr. 2007.
18. T. Xie and I. A. Rousseau, "Facile tailoring of thermal transition temperatures of epoxy shape memory polymers, " Polymer, vol. 50, no. 8, pp. 1852-1856, Apr. 2009.
19. J. D. Eisenhaure, T. Xie, S. Varghese, and S. Kim, "Microstructured shape memory polymer surfaces with reversible dry adhesion, " ACS Appl. Mater. Inter., vol. 5, no. 16, pp. 7714-7717, Aug. 2013.
20. T. Xie and X. Xiao, "Self-peeling reversible dry adhesive system, " Chem. Mater., vol. 20, no. 9, pp. 2866-2868, May 2008.
21. Y. Y. Huang et al., "Stamp collapse in soft lithography, " Langmuir, vol. 21, no. 17, pp. 8058-8068, Aug. 2005.
22. A. F. Bower, Applied Mechanics of Solids, 1st ed. Boca Raton, FL, USA: CRC Press, 2011.
23. J. R. Rice, "A path independent integral and the approximate analysis of strain concentration by notches and cracks, " J. Appl. Mech., vol. 35, no. 2, pp. 379-386, Jun. 1968.
24. B. Lorenz et al., "Adhesion: Role of bulk viscoelasticity and surface roughness, " J. Phys., Condens. Matter, vol. 25, no. 22, p. 225004, Jun. 2013.
25. Z. Chen, S. Diebels, N. J. Peter, and A. S. Schneider, "Identification of finite viscoelasticity and adhesion effects in nanoindentation of a soft polymer by inverse method, " Comput. Mater. Sci., vol. 72, pp. 127-139, May 2013.
26. G. Haiat and E. Barthel. (Sep. 2007). "An approximate model for the adhesive contact of rough viscoelastic surfaces. " [Online]. Available: http: //arxiv. org/abs/0709. 0584
27. G. Castellanos, E. Arzt, and M. Kamperman, "Effect of viscoelasticity on adhesion of bioinspired micropatterned epoxy surfaces, " Langmuir, vol. 27, no. 12, pp. 7752-7759, Jun. 2011.
28. S. Wanka, M. Kappl, M. Wolkenhauer, and H.-J. Butt, "Measuring adhesion forces in powder collectives by inertial detachment, " Langmuir, vol. 29, no. 52, pp. 16075-16083, Dec. 2013.
29. Y. Zhang, H. Keum, K. Park, R. Bashir, and S. Kim, "Micro-masonry of MEMS sensors and actuators, " J. Microelectromech. Syst., vol. 23, no. 2, pp. 308-314, Apr. 2014.
30. M. Mehregany, S. F. Bart, L. S. Tavrow, J. H. Lang, and S. D. Senturia, "Principles in design and microfabrication of variable-capacitance sidedrive motors, " J. Vac. Sci. Technol. A, vol. 8, no. 4, pp. 3614-3624, Jul. 1990.
31. M. Mehregany and Y.-C. Tai, "Surface micromachined mechanisms and micromotors, " J. Micromech. Microeng., vol. 1, no. 2, pp. 73-85, Jun. 1991.
32. R. Saeidpourazar, M. D. Sangid, J. A. Rogers, and P. M. Ferreira, "A prototype printer for laser driven micro-transfer printing, " J. Manuf. Process., vol. 14, no. 4, pp. 416-424, Oct. 2012.