A prototype printer for laser driven micro-transfer printing

Journal of Manufacturing Processes

Volumn 14, Issue 4, 2012, Pages 416-424

  Saeidpourazar, Reza ^a   Sangid, Michael D ^b   Rogers, John A ^c   Ferreira, Placid M ^d  

^a Brooks Automation Inc   (United States)

^b Purdue University   (United States)

^c United States of America   (United States)

^d UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Component placement; Flexible electronics; Laser delamination; Micro transfer printing; Thermo mechanical delamination

Indexed keywords

COMPONENT PLACEMENT; DESIGN AND TESTS; GLASSES AND CERAMICS; GROWTH SUBSTRATES; LARGE-AREA ELECTRONICS; LASER TRANSFER; METALLIC FOILS; NON-CONTACT; PHOTOVOLTAICS; PHYSICAL PHENOMENA; PREPARATION AND PROPERTIES; PRINT HEAD; PRINTING CAPABILITIES; PRINTING TECHNOLOGIES; THERMO-MECHANICAL; TRANSFER PRINTING;

DELAMINATION; FLEXIBLE DISPLAYS; FLEXIBLE ELECTRONICS; LASERS; MICROSTRUCTURE; PRINTING;

SUBSTRATES;

EID: 84869088752     PISSN: 15266125     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmapro.2012.09.014     Document Type: Conference Paper

References (23)

1. R.-H. Kim, D.-H. Kim, J. Xiao, B.H. Kim, S.-I. Park, and B. Panilaitis Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics Nature Materials 9 2010 929 937
2. J. Yoon, A.J. Baca, S.-I. Park, P. Elvikis, J.B. Geddes, and L. Li Ultrathin silicon solar microcells for semitransparent, mechanically flexible and microconcentrator module designs Nature Materials 7 2008 907 915
3. M.A. Meitl, Z.T. Zhu, V. Kumar, K.J. Lee, X. Feng, and Y.Y. Huang Transfer printing by kinetic control of adhesion to an elastomer stamp Nature Materials 5 2006 33 38 (Pubitemid 43049385)
4. S. Kim, J. Wu, A. Carlson, S.H. Jin, A. Kovalsky, and P. Glass Microstructured elastomeric surfaces with reversible adhesion and examples of their use in deterministic assembly by transfer printing Proceedings of the National Academy of Sciences of the United States of America 107 40 2010 17095 17100
5. F.N. Ishikawa, H.K. Chang, K. Ryu, P.C. Chen, A. Badmaev, and L.G. De Arco Transparent electronics based on transfer printed aligned carbon nanotubes on rigid and flexible substrates ACS Nano 3 2009 73 79
6. C.A. Bower, E. Menard, and E. Bonafede Active-matrix OLED display backplanes using transfer-printed microscale integrated circuits Proceeding of the 59th Electronic Component and Technology Conference San Diego, CA, USA 2010
7. K.J. Lee, M.A. Meitl, J.H. Ahn, J.A. Rogers, R.G. Nuzzo, and V. Kumar Bendable GaN high electron mobility transistors on plastic substrates Journal of Applied Physics 100 12 2006 124507-124507-4
8. H.C. Ko, M.P. Stoykovich, J. Song, V. Malyarchuk, W.M. Choi, and C.-J. Yu A hemispherical electronic eye camera based on compressible silicon optoelectronics Nature 454 2008 748 753
9. K.J. Hsia, Y. Huang, E. Menard, J.-U. Park, W. Zhou, and J. Rogers Collapse of stamps for soft lithography due to interfacial adhesion Applied Physics Letters 86 15 2005 1900303
10. Y. Huang, W. Zhou, K.J. Hsia, E. Menard, J.-U. Park, and J. Rogers Stamp collapse in soft lithography Langmuir 21 17 2005 8058 8068 (Pubitemid 44323839)
11. J.E. Mark Polymer data handbook 1984 Oxford University Press New York
12. Y. Okada, and Y. Tokumaru Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K Journal of Applied Physics 56 2 1984 314 320 (Pubitemid 14626802)
13. J. Bohandy, B.F. Kim, and F.J. Adrian Metal deposition from a supported metal film using an excimer laser Journal of Applied Physics 60 1986 1538
14. A.S. Holmes, and S.M. Saidam Sacrificial layer process with laser-driven release for batch assembly operations Journal of Microelectromechanical Systems 7 4 1998 416 422 (Pubitemid 128594633)
15. R. Wartena, A.E. Curtright, C.B. Arnold, A. Piqué, and K.E. Swider-Lyons Li-ion microbatteries generated by a laser direct-write method Journal of Power Sources 126 1-2 2004 193 202 (Pubitemid 41331273)
16. G.G. Stoney The tension of metallic films deposited by electrolysis Proceedings of the Royal Society of London Series A 82 553 1909 172 175
17. L.B. Freund, and S. Suresh Thin film materials - stress, defect formation, and surface evolution 2003 Cambridge University Press Cambridge
18. M.K. Chaudhury, and G.M. Whitesides Direct measurement of interfacial interactions between semispherical lenses and flat sheets of poly(dimethylsiloxane) and their chemical derivatives Langmuir 7 5 1991 1013 1025
19. D. Armani, C. Liu, and N. Aluru Re-configurable fluid circuits by PDMS elastomer micromachining MEMS'99 twelfth IEEE international conference Orlando, FL 1999 222 227
20. M. Deruelle, L. Leger, and M. Tirrell Adhesion at the solid-elastomer interface: influence of the interfacial chains Macromolecules 28 1995 7419 7428
21. G. Camino, S.M. Lomakin, and M. Lazzari Polydimethylsiloxane thermal degradation. Part 1. Kinetic aspects Polymer 42 2001 2395 2402
22. http://www.rpgroups.caltech.edu/courses/aph162/2007/Protocols/Optics/ e3872-Gaussian-Beam-Optics.pdf
23. R. Saeidpourazar, R. Li, Y. Li, M.D. Sangid, C. Lu, and Y. Huang Laser-driven non-contact transfer printing of prefabricated microstructures IEEE/ASME Journal of Microelectromechanical Systems 21 4 2012 1049 1058