Resolving 45-pm-separated Si-Si atomic columns with an aberration-corrected STEM

Microscopy

Volumn 64, Issue 3, 2015, Pages 213-217

  Sawada, Hidetaka ^a   Shimura, Naoki ^a   Hosokawa, Fumio ^a   Shibata, Naoya ^b,c   Ikuhara, Yuichi ^b  

^a JEOL LTD   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Aberration correction; Cold field emission gun; High angle annular dark field image; Scanning transmission electron microscope; Sub 50 pm resolution

Indexed keywords

FIELD EMISSION; PROBES;

ABERRATION CORRECTION; ABERRATION-CORRECTED; ATOMIC COLUMNS; COLD FIELD EMISSION GUN; COLD FIELD EMISSIONS; FIELD EMISSION GUNS; GAUSSIANS; HIGH-ANGLE ANNULAR DARK-FIELD IMAGES; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SUB-50 PM RESOLUTION;

TRANSMISSION ELECTRON MICROSCOPY;

EID: 84939471963     PISSN: 20505698     EISSN: 20505701     Source Type: Journal    
DOI: 10.1093/jmicro/dfv014     Document Type: Letter

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