Metal-Organic Frameworks: New Interlayer Dielectric Materials

ChemElectroChem

Volumn 2, Issue 6, 2015, Pages 786-788

  Usman, Muhammad ^a,b,c   Mendiratta, Shruti ^a   Lu, Kuang Lieh ^a  

^a INSTITUTE OF CHEMISTRY   (Taiwan)

^b ACADEMIA SINICA   (Taiwan)

^c NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Dielectric properties; Inorganic chemistry; Integrated circuits; Metal organic framework; Microelectronics

Indexed keywords

CRYSTALLINE MATERIALS; DIELECTRIC PROPERTIES; INORGANIC COMPOUNDS; INTEGRATED CIRCUITS; LEAKAGE CURRENTS; MICROELECTRONICS; ORGANIC POLYMERS; ORGANOMETALLICS; REACTION KINETICS;

INORGANIC CHEMISTRY; INTER-LAYER DIELECTRIC MATERIALS; LOW DIELECTRIC CONSTANTS; LOW-LEAKAGE CURRENT; METAL ORGANIC FRAMEWORK; METALORGANIC FRAMEWORKS (MOFS); MICROELECTRONICS INDUSTRY; NEW APPLICATIONS;

DIELECTRIC MATERIALS;

EID: 84938593169     PISSN: None     EISSN: 21960216     Source Type: Journal    
DOI: 10.1002/celc.201402456     Document Type: Article

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