Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2015-February, Issue February, 2015, Pages 29-32

  Senkal, D ^a   Ng, E J ^b   Hong, V ^b   Yang, Y ^b   Ahn, C H ^b   Kenny, T W ^b   Shkel, A M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; MECHANICS; Q FACTOR MEASUREMENT; STABILIZATION;

AMPLITUDE CONTROL; DRIVE ELECTRONICS; EPITAXIAL SILICON; FPGA BASED CONTROLS; PARAMETRIC DRIVES; PARAMETRIC PUMPING; SCALE FACTOR STABILITY; TEMPERATURE STABILIZATION;

MEMS;

EID: 84931038380     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2015.7050878     Document Type: Conference Paper

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