Experimental investigation of parametric and externally forced motion in resonant MEMS sensors

Journal of Micromechanics and Microengineering

Volumn 19, Issue 1, 2009, Pages

  Harish, K M ^a   Gallacher, B J ^a   Burdess, J S ^a   Neasham, J A ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; ELECTROSTATIC ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MICROWAVE AMPLIFIERS; PARAMETRIC AMPLIFIERS; RESONANCE;

EXCITATION METHODS; EXPERIMENTAL INVESTIGATIONS; FREQUENCY RESPONSE FUNCTIONS; GAIN FACTORS; HARMONIC FORCING; MEMS SENSORS; PARAMETRIC AMPLIFICATIONS; PARAMETRIC EXCITATIONS; PARAMETRIC RESONANCES; PRINCIPAL FACTORS; Q FACTORS; SENSOR PERFORMANCE; THEORETICAL PREDICTIONS;

FREQUENCY RESPONSE;

EID: 62649120098     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/1/015021     Document Type: Article

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