Graphitic Patterns on CVD Diamond Plate as Microheating/Thermometer Devices

ACS Applied Materials and Interfaces

Volumn 7, Issue 20, 2015, Pages 10896-10904

  Di Gioacchino, Daniele ^a   Marcelli, Augusto ^a,b   Puri, Alessandro ^a   De Sio, Antonio ^d   Cestelli Guidi, Mariangela ^a   Kamili, Yimamu ^e   Della Ventura, Giancarlo ^c   Notargiacomo, Andrea ^f   Postorino, Paolo ^g   Mangialardo, Sara ^g   Woerner, Eckhard ^h   Pace, Emanuele ^a,d  

^a INFN LABORATORI NAZIONALI DI FRASCATI   (Italy)

^b RICMASS Via Dei Sabelli 119A   (Italy)

^c ROMA TRE UNIVERSITY   (Italy)

^d UNIVERSITY OF FLORENCE   (Italy)

^e UNIVERSITY OF CAMERINO   (Italy)

^f IFN Institute for Photonic and Nanotechnologies   (Italy)

^g SAPIENZA UNIVERSITY OF ROME   (Italy)

^h DIAMOND MATERIALS GMBH   (Germany)

Author keywords

CVD diamond; Graphitic planar structure; Laser patterning; Microheater; Microthermometer

Indexed keywords

CALIBRATION; CARBON; DIAMONDS; HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; STRESSES; SYNTHETIC DIAMONDS;

CVD DIAMOND; LASER PATTERNING; MICROHEATER; MICROTHERMOMETER; PLANAR STRUCTURE;

PLATES (STRUCTURAL COMPONENTS);

EID: 84930660058     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/acsami.5b02094     Document Type: Article

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