Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography

Optica

Volumn 1, Issue 1, 2014, Pages 39-44

  Seaberg, Matthew D ^a   Zhang, Bosheng ^a   Gardner, Dennis F ^a   Shanblatt, Elisabeth R ^a   Murnane, Margaret M ^a   Kapteyn, Henry C ^a   Adams, Daniel E ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

Harmonic generation and mixing; Microscopy; Phase measurement; X ray microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; EXTREME ULTRAVIOLET LITHOGRAPHY; IMAGING TECHNIQUES; MICROSCOPIC EXAMINATION; PHASE MEASUREMENT; SCANNING ELECTRON MICROSCOPY;

ATOMIC FORCE MICROSCOPE IMAGES; COHERENT DIFFRACTIVE IMAGING; DIFFRACTION LIMITED; EXTREME ULTRAVIOLET IMAGING; EXTREME ULTRAVIOLETS; HARMONIC GENERATION AND MIXING; NANOMETER RESOLUTIONS; X RAY MICROSCOPY;

MIXER CIRCUITS;

EID: 84929455664     PISSN: 23342536     EISSN: None     Source Type: Journal    
DOI: 10.1364/OPTICA.1.000039     Document Type: Article

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