Ar ions irradiation effects in ZrN thin films grown by pulsed laser deposition

Applied Surface Science

Volumn 336, Issue , 2015, Pages 129-132

  Craciun, D ^a   Socol, G ^a   Dorcioman, G ^a   Simeone, D ^b,c   Gosset, D ^b,c   Behdad, S ^d   Boesl, B ^d   Craciun, V ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b CEA SACLAY   (France)

^c ECOLE CENTRALE PARIS   (France)

^d Florida International University   (United States)

Author keywords

Hard coating; Pulsed laser deposition; Radiation effects; ZrN

Indexed keywords

ARGON LASERS; EXCIMER LASERS; HARD COATINGS; ION BOMBARDMENT; LATTICE CONSTANTS; NANOCRYSTALS; PULSED LASER DEPOSITION; RADIATION EFFECTS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; ZIRCONIUM COMPOUNDS;

AR-ION IRRADIATION; GLANCING INCIDENCE X-RAY DIFFRACTIONS; IONS IRRADIATION; KRF EXCIMER LASER; NANOCRYSTALLINES; STRUCTURE AND PROPERTIES; SUBSTRATE TEMPERATURE; X RAY REFLECTIVITY;

PULSED LASERS;

EID: 84925440995     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2014.10.032     Document Type: Conference Paper

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