Ion beam induced crystalline texturing during thin film deposition

Surface and Coatings Technology

Volumn 264, Issue , 2015, Pages 1-8

  Matias, Vladimir ^a   Hammond, Robert H ^b  

^a IBeam Materials   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

Crystal alignment; IBAD; IBAD texturing; Ion beam assisted deposition; Texturing; Thin film deposition

Indexed keywords

ALIGNMENT; EPITAXIAL FILMS; ION BEAMS; IONS; MAGNESIA; NANOCRYSTALLINE MATERIALS; OXIDE MINERALS; SINGLE CRYSTALS; SUBSTRATES; SUPERCONDUCTING DEVICES; SUPERCONDUCTING FILMS; TEXTURES; TEXTURING;

ALTERNATIVE SUBSTRATES; BIAXIAL TEXTURING; CRYSTAL ALIGNMENT; DEGREE OF ALIGNMENTS; ENERGY APPLICATIONS; SINGLE CRYSTAL SUBSTRATES; TEXTURE EVOLUTIONS; THIN-FILM DEPOSITIONS;

ION BEAM ASSISTED DEPOSITION;

EID: 84922941362     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2014.12.018     Document Type: Review

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