The role of nucleation surfaces in the texture development of magnesium oxide during ion beam assisted deposition

IEEE Transactions on Applied Superconductivity

Volumn 21, Issue 3 PART 3, 2011, Pages 2904-2907

  Groves, James R ^a   Matias, Vladimir ^b   DePaula, Raymond F ^b   Stan, Liliana ^b   Hammond, Robert H ^c   Clemens, Bruce M ^a  

^a Stanford University   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c STANFORD UNIVERSITY   (United States)

Author keywords

Biaxial texture; Ion beam assisted deposition; Nucleation and growth; RHEED; Thin films

Indexed keywords

ARGON ION; BIAXIAL TEXTURES; DEPOSITION METHODS; ELECTRON BEAM EVAPORATION; IN-PLANE; IN-PLANE TEXTURE; IN-SITU; ION IRRADIATION; MAGNESIUM OXIDES; MGO FILMS; MOSAIC SPREAD; NANO-CRYSTALLINE STRUCTURES; NATIVE OXIDES; NUCLEATION AND GROWTH; PROCESS OPTIMIZATION; RHEED; SILICON SUBSTRATES; TEXTURE DEVELOPMENT;

ALUMINUM; AMORPHOUS FILMS; ARGON; ATOMIC LAYER DEPOSITION; BEAM PLASMA INTERACTIONS; DEPOSITION; ELECTRON BEAMS; ION BEAMS; ION BOMBARDMENT; IONS; MAGNESIUM; NUCLEATION; OPTIMIZATION; OXIDE FILMS; TEXTURES; THIN FILMS; VAPOR DEPOSITION;

ION BEAM ASSISTED DEPOSITION;

EID: 79957969456     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2010.2089401     Document Type: Article

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