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Volumn 327, Issue , 2015, Pages 7-12

Structure characterization and strain relief analysis in CVD growth of boron phosphide on silicon carbide

Author keywords

Boron phosphide; CVD; Defect; Neutron detection; Strain relief

Indexed keywords

BORON CARBIDE; CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; DEFECTS; FILM GROWTH; GRAIN BOUNDARIES; III-V SEMICONDUCTORS; LATTICE MISMATCH; MICROSTRUCTURE; NEUTRON DETECTORS; SILICON CARBIDE; STACKING FAULTS; THICK FILMS;

EID: 84921653842     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2014.11.037     Document Type: Article
Times cited : (40)

References (13)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.