High rate deposition of thin film cadmium sulphide by pulsed direct current magnetron sputtering

Thin Solid Films

Volumn 574, Issue , 2015, Pages 43-51

  Lisco, F ^a   Kaminski, P M ^a   Abbas, A ^a   Bowers, J W ^a   Claudio, G ^a   Losurdo, M ^b   Walls, J M ^a  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

^b CNR   (Italy)

Author keywords

Cadmium sulphide; Pulsed direct current magnetron sputtering; Refractive index; Scanning electron microscopy; Transmission electron microscopy

Indexed keywords

CADMIUM; CADMIUM SULFIDE; CADMIUM TELLURIDE; COPPER; ELECTRON MICROSCOPY; FILM THICKNESS; INDIUM; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM; SPUTTERING; SULFUR COMPOUNDS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; ZINC SULFIDE;

CHEMICAL-BATH DEPOSITION; CLOSE SPACE SUBLIMATIONS; COPPER ZINC TIN SULPHIDES; COPPER-INDIUM-SELENIDE; PULSED DIRECT CURRENT; RADIO FREQUENCY SPUTTERING; ROOM TEMPERATURE DEPOSITION; THIN FILM PHOTOVOLTAICS;

DEPOSITION;

EID: 84921305288     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2014.11.065     Document Type: Article

References (33)

1. A.D. Compaan, A. Gupta, J. Drayton, S.-H. Lee, S. Wang, 14% sputtered thin-film solar cells based on CdTe, Phys. Status Solidi B 241 (2004) 779.
2. P. Jackson, D. Hariskos, E. Lotter, S. Paetel, R. Wuerz, R. Menner, et al., New world record efficiency for Cu (In, Ga) Se 2 thin-film solar cells beyond 20%, Prog. Photovolt. Res. Appl. 19 (2011) 894.
3. K. Senthil, D. Mangalaraj, S. Narayandass, S. Adachi, Optical constants of vacuum-evaporated cadmium sulphide thin films measured by spectroscopic ellipsometry, Mater. Sci. Eng. B 78 (2000) 53.
4. K. Assali, M. Boustani, A. Khiara, T. Bekkay, A. Outzourhit, E.L. Ameziane, et al., Some structural and optical properties of CdS thin films prepared by RF sputtering, Phys. Status Solidi A 178 (2000) 701.
5. Z.R. Khan, M. Zulfequar, M.S. Khan, Optical and structural properties of thermally evaporated cadmium sulphide thin films on silicon (100) wafers, Mater. Sci. Eng. B 174 (2010) 145.
6. U. Pal, R. Silva-Gonzalez, Optical characterization of vacuum evaporated cadmium sulfide films, Thin Solid Films 305 (1997) 345.
7. E.B. Yous, T. Asikainen, V. Pietu, P. Cowache, M. Powalla, D. Lincot, Cadmium-free buffer layers deposited by atomic later epitaxy for copper indium diselenide solar cells, 3622000. 183.
8. I. Repins, M.A. Contreras, B. Egaas, C. Dehart, J. Scharf, C.L. Perkins, 19.9%-efficient ZnO/CdS/CuInGaSe 2 solar cell with 81.2% fill factor z, 2008. 235.
9. J. Rousset, F. Donsanti, P. Genevée, G. Renou, D. Lincot, High efficiency cadmium free Cu(In, Ga)Se2 thin film solar cells terminated by an electrodeposited front contact, Sol. Energy Mater. Sol. Cells 95 (2011) 1544.
10. S. Spiering, D. Hariskos, M. Powalla, N. Naghavi, D. Lincot, CD-free Cu(In, Ga)Se2 thin-film solar modules with In2S3 buffer layer by ALCVD, Thin Solid Films 431-432 (2003) 359.
11. B. Shin, O. Gunawan, Y. Zhu, N.A. Bojarczuk, S.J. Chey, S. Guha, Thin film solar cell with 8.4% power conversion efficiency using an earth-abundant Cu 2 ZnSnS 4 absorber, Prog. Photovolt. Res. Appl. 21 (2013) 72.
12. S. Cinque, T. Unold, R. Klenk, S. Schorr, H. Schock, Cu 2 ZnSnS 4 thin film solar cells by fast coevaporation, Prog. Photovolt. Res. Appl. 19 (2011) 93.
13. K.L. Earth, R.A. Enzenroth, W.S. Sampath, Advances in continuous, in-line processing of stable CdSlCdTe devices, Photovoltaic Specialists Conference, 2002, Conference Record of the Twenty-Ninth IEEE, 2002, p. 3.
14. P.V. Meyers, Design of a thin film CdTe solar cell, Sol. Cells 23 (1988) 59.
15. S. Duke, R.W. Miles, Characterisation of in-situ thermally evaporated CdS/CdTe thin film solar cells with Ni-P back contacts, J. Cryst. Growth 159 (1996) 916.
16. R. Bube, CdTe junction phenomena, Sol. Cells 23 (1988) 1.
17. R. Berrigan, N. Maung, S.J. Irvine, D. Cole-Hamilton, D. Ellis, Thin films of CdTe/CdS grown by MOCVD for photovoltaics, J. Cryst. Growth 195 (1998) 718.
18. D.E. Swanson, R.M. Geisthardt, J.T. Mcgoffin, J.D. Williams, J.R. Sites, Improved CdTe solar-cell performance by plasma cleaning the TCO layer, IEEE J. Photovolt. 3 (2013) 838.
19. A. Bosio, D. Menossi, S. Mazzamuto, N. Romeo, Manufacturing of CdTe thin film photovoltaic modules, Thin Solid Films 519 (2011) 7522.
20. J.D. Major, Y.Y. Proskuryakov, K. Durose, Impact of CdTe Surface Composition on Doping and Device Performance in Close Space Sublimation Deposited CdTe, Solar Cells, 2013. 436.
21. A. Ashour, N. El-Kadry, S.A. Mahmoud, On the electrical and optical properties of CdS films thermally deposited by a modified source, Thin Solid Films 269 (1995) 117.
22. C.T. Tsai, D.S. Chuu, G.L. Chen, S.L. Yang, Studies of grain size effects in rf sputtered CdS thin films, J. Appl. Phys. 79 (1996) 9105.
23. N.-H. Kim, S.-H. Ryu, H.-S. Noh, W.-S. Lee, Electrical and optical properties of sputter-deposited cadmium sulfide thin films optimized by annealing temperature, Mater. Sci. Semicond. Process. 15 (2012) 125.
24. A. Gupta, A.D. Compaan, All-sputtered 14% CdS/CdTe thin-film solar cell with ZnO: Al transparent conducting oxide, Appl. Phys. Lett. 85 (2004) 684.
25. J.K. Cooper, J. Cao, J.Z. Zhang, Exciton dynamics of CdS thin films produced by chemical bath deposition and DC pulse sputtering, ACS Appl. Mater. Interfaces 5 (2013) 7544.
26. P. Kelly, R. Arnell, Magnetron sputtering: a review of recent developments and applications, Vacuum 56 (2000) 159.
27. G. Bräuer, B. Szyszka, M. Vergöhl, R. Bandorf, Magnetron sputtering-milestones of 30 years, Vacuum 84 (2010) 1354.
28. P.M. Kaminski, F. Lisco, J.M. Walls, Multilayer broadband antireflective coatings for more efficient thin film CdTe solar cells, IEEE J. Photovolt. 4 (2014) 452.
29. F. Lisco, A. Abbas, B. Maniscalco, P.M. Kaminski, M. Losurdo, K. Bass, et al., Pinhole free thin film CdS deposited by chemical bath using a substrate reactive plasma treatment, J. Renew. Sustain. Energy 6 (2014) 011202.
30. W. Petasch, B. Kegel, H. Schmid, K. Lendenmann, H. Keller, Low-pressure plasma cleaning: a process for precision cleaning applications, Surf. Coat. Technol. 97 (1997) 176.
31. A. Rakhshani, Study of Urbach tail, bandgap energy and grain-boundary characteristics in CdS by modulated photocurrent spectroscopy, J. Phys. Condens. Matter 12 (2000) 4391.
32. H. Fujiwara, Spectroscopic Ellipsometry Principles and Applications, 1st ed. Wiley, 2007.
33. D.A. Mazón-Montijo, M. Sotelo-Lerma, L. Rodríguez-Fernández, L. Huerta, AFM, XPS and RBS studies of the growth process of CdS thin films on ITO/glass substrates deposited using an ammonia-free chemical process, Appl. Surf. Sci. 256 (2010) 4280.