Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas

Applied Physics Letters

Volumn 105, Issue 23, 2014, Pages

  Greb, Arthur ^a   Niemi, Kari ^a   O'Connell, Deborah ^a   Gans, Timo ^a  

^a UNIVERSITY OF YORK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC EXCITATION; IMPACT IONIZATION; OXYGEN; PHOTODISSOCIATION; PLASMA JETS; RADIO WAVES; TWO PHOTON PROCESSES;

ATOMIC OXYGEN DENSITY; DIAGNOSTIC METHODS; ELECTRON-IMPACT EXCITATION; LASER INDUCED FLUORESCENCE; RADIO FREQUENCY PLASMA; SIMULTANEOUS DETERMINATIONS; SIMULTANEOUS MEASUREMENT; TWO-PHOTON ABSORPTIONS;

ELECTRON ENERGY LEVELS;

EID: 84918541027     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4903931     Document Type: Article

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