Comparison of a hybrid model with experiments in atmospheric pressure helium and argon capacitive rf discharges

Plasma Sources Science and Technology

Volumn 23, Issue 6, 2014, Pages

  Ding, Ke ^a,b   Lieberman, M A ^a   Lichtenberg, A J ^a   Shi, Jian Jun ^b   Zhang, Jing ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b DONGHUA UNIVERSITY   (China)

Author keywords

argon discharge; atmospheric pressure rf discharge; helium discharge

Indexed keywords

ATMOSPHERIC PRESSURE; HELIUM; SECONDARY EMISSION;

ARGON DISCHARGES; ELECTRON MULTIPLICATION; HELIUM DISCHARGE; MATERIALS PROCESSING; MODE TRANSITIONS; RADIO FREQUENCIES; RF DISCHARGE; SECONDARY EMISSION COEFFICIENTS;

ARGON;

EID: 84915746278     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/23/6/065048     Document Type: Article

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