Development of an atmospheric-pressure homogeneous and cold Ar/ O 2 plasma source operating in glow discharge

Physics of Plasmas

Volumn 17, Issue 6, 2010, Pages

  Li, Shou Zhe ^a   Wu, Qi ^a   Zhang, Jialiang ^a   Wang, Dezhen ^a   Uhm, Han S ^b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b Kwangwoon University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC STRIPS; GAS FLOWS; LOW GAS TEMPERATURE; MATERIAL TREATMENT; METAL PLATES; PLASMA DISCHARGE; RADIO-FREQUENCY POWER SUPPLY; SPATIAL HOMOGENEITY;

ARGON; CARBON BLACK; GLOW DISCHARGES; INLET FLOW; OXYGEN; PARALLEL FLOW; PLASMA SOURCES; PLATE METAL;

PLASMA DIAGNOSTICS;

EID: 77954119211     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3447877     Document Type: Article

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