MEIS, TEM and GISAXS investigation of buried Pb nanoislands in SiO 2 /Si interface

Applied Surface Science

Volumn 321, Issue , 2014, Pages 80-85

  Sanchez, D F ^a   Rodrigues, F ^a   Luce, F P ^a,c   Fabrim, Z E ^a   De Azevedo, G M ^a,b   Kellermann, G ^b   Baptista, D L ^a   Grande, P L ^a   Fichtner, P F P ^a  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^b FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

^c CEA LETI   (France)

Author keywords

Grazing incidence small angle x ray; Medium energy ion scattering; Nanoparticles; Scattering; Transmission electron microscopy

Indexed keywords

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION IMPLANTATION; IONS; NANOPARTICLES; PLASMA INTERACTIONS; SCATTERING; SILICA; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

COMPLEMENTARY TECHNIQUES; GRAZING INCIDENCE SMALL-ANGLE X-RAY SCATTERING; MEDIUM ENERGY ION SCATTERING; MICRO-STRUCTURAL; MORPHOLOGICAL PROPERTIES; NANOPARTICLE (NPS); NANOSTRUCTURED SYSTEMS; SMALL ANGLE X-RAYS;

X RAY SCATTERING;

EID: 84912104838     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2014.09.190     Document Type: Article

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