Ultrasmooth and thermally stable silver-based thin films with subnanometer roughness by aluminum doping

ACS Nano

Volumn 8, Issue 10, 2014, Pages 10343-10351

  Gu, Deen ^a,b   Zhang, Cheng ^a   Wu, Yi Kuei ^a   Guo, L Jay ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Ag films; Al doping; capping layer; RMS roughness; thermal stability; ultrasmoothness

Indexed keywords

ALUMINUM; MASS TRANSPORTATION; MORPHOLOGY; OPTOELECTRONIC DEVICES; SILICA; SILICON; SILVER; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; THERMODYNAMIC STABILITY; ULTRATHIN FILMS;

AG FILMS; AL-DOPING; CAPPING LAYER; RMS ROUGHNESS; ULTRASMOOTHNESS;

SEMICONDUCTOR DOPING;

EID: 84908426118     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn503577c     Document Type: Article

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