Crack-free AlGaN/GaN distributed Bragg reflectors synthesized by insertion of a thin SiNx interlayer grown on 6H-SiC substrate by metal-organic chemical vapor deposition

Materials Science in Semiconductor Processing

Volumn 27, Issue , 2014, Pages 841-845

  Tao, Pengcheng ^a   Liang, Hongwei ^a   Wang, Dongsheng ^a   Xia, Xiaochuan ^a   Feng, Qiuju ^c   Liu, Yang ^a   Shen, Rensheng ^a   Zhang, Kexiong ^a   Luo, Yingmin ^a   Guo, Wenping ^d   Deng, Qunxiong ^d   Du, Guotong ^a,b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b JILIN UNIVERSITY   (China)

^c LIAONING NORMAL UNIVERSITY   (China)

^d Jiangsu Xinguanglian Technology Co Ltd   (China)

Author keywords

Distributed Bragg reflectors; Metal organic chemical vapor deposition; Silicon carbide; Ultraviolet

Indexed keywords

SILICON CARBIDE;

ALGAN/GAN; CRACK FREE; METAL-ORGANIC; SIC SUBSTRATES; ULTRAVIOLET;

DISTRIBUTED BRAGG REFLECTORS;

EID: 84908293032     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2014.08.003     Document Type: Article

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