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Volumn 46, Issue 10-11, 2014, Pages 936-939
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Dual beam organic depth profiling using large argon cluster ion beams
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Author keywords
Ar GCIB; Argon cluster; Organic depth profiling; SIMS; ToF SIMS
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Indexed keywords
ARGON;
CLUSTER ANALYSIS;
ION BEAM ASSISTED DEPOSITION;
ION BEAMS;
KINETIC ENERGY;
KINETICS;
ORGANIC LIGHT EMITTING DIODES (OLED);
SECONDARY ION MASS SPECTROMETRY;
ARGON CLUSTERS;
DEPTH RESOLUTION;
ORGANIC COMPONENTS;
ORGANIC DEPTH PROFILING;
ORGANIC MULTILAYERS;
REFERENCE MATERIAL;
SPUTTER YIELDS;
TOF SIMS;
DEPTH PROFILING;
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EID: 84908149056
PISSN: 01422421
EISSN: 10969918
Source Type: Journal
DOI: 10.1002/sia.5429 Document Type: Article |
Times cited : (17)
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References (11)
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