Preparation and properties of transparent conductive N-doped CuAlO 2 films using N2O as the N source

Journal of Materials Science: Materials in Electronics

Volumn 25, Issue 9, 2014, Pages 4004-4007

  Pan, Jiaqi ^a   Lan, Wei ^a   Liu, Hongquan ^b   Sheng, Yingzhuo ^a   Feng, Boxue ^a   Zhang, Xin ^a   Xie, Erqing ^a  

^a LANZHOU UNIVERSITY   (China)

^b Institute of North Electronic Equipment   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CONDUCTIVE FILMS; DOPING (ADDITIVES); IONIZATION OF GASES; MAGNETRON SPUTTERING; QUARTZ;

CONDUCTIVE PROPERTIES; INFRARED TRANSMITTANCE; OPTICAL AND ELECTRICAL PROPERTIES; QUARTZ SUBSTRATE; RF-MAGNETRON SPUTTERING; ROOM TEMPERATURE; TRANSPARENT CONDUCTIVE; VISIBLE TRANSMITTANCE;

FILM PREPARATION;

EID: 84905823180     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-014-2121-x     Document Type: Article

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