Ozone flexible sensors fabricated by photolithography and laser ablation processes based on ZnO nanoparticles

Sensors and Actuators, B: Chemical

Volumn 203, Issue , 2014, Pages 602-611

  Acuautla, M ^a   Bernardini, S ^a   Gallais, L ^b   Fiorido, T ^a   Patout, L ^c   Bendahan, M ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b AIX MARSEILLE UNIVERSITÉ   (France)

^c CNRS   (France)

Author keywords

Flexible sensor; Gas sensor; Ozone sensor; ZnO nanoparticles

Indexed keywords

CHEMICAL SENSORS; FABRICATION; FILM THICKNESS; GAS DETECTORS; LASER ABLATION; METAL NANOPARTICLES; PHOTOLITHOGRAPHY;

DIMENSIONAL VARIATIONS; FLEXIBLE SENSOR; INTER-DIGITATED ELECTRODES; OZONE SENSOR; SENSING CHARACTERISTICS; SENSITIVE THIN FILMS; STANDARD PHOTOLITHOGRAPHY; ZNO NANOPARTICLES;

OZONE; CHEMICAL SENSORS;

EID: 84905001909     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2014.07.010     Document Type: Article

References (41)

1. D. Briand, F. Molina Lopez, A. Vasquez Quintero, C. Ataman, J. Coubat, and N.F. de Rooij Why going toward plastic and flexible sensors? Procedia Engineering 25 2011 8 15
2. W.S. Wong, and A. Salleo Flexible electronics Materials and Applications 2009 Springer
3. K. Jain, M. Klosner, M. Zemel, and S. Raghunandan Flexible electronic and displays Proceedings of the IEEE 93 8 2005 1500 1510
4. J. Fjelstad Flexible Circuit Technology third ed. 2006 BR Publishing
5. Y. Huang, M. Wang, H. Qui, B. Xiang, and Y. Zhang Research and preparation method of flexible tactile sensor materials Open Access Database 2008 325 340
6. J. Courbat, D. Briand, L. Yue, S. Raible, and N.F. Rooij Drop-coated metal oxide gas sensors on polyimide foil with reduced power consumption for wireless applications Sensors and Actuators B 161 2012 862 868
7. J.A. Dobrzynska, and M. Gijs Flexible polyimide-based force sensor Sensors and Actuators A 173 2012 127 135
8. K. Wetchakun, T. Samerjai, N. Tamaekong, C. Liewhiran, C. Siriwong, V. Kruefu, A. Wisitsoraat, A. Tuantranont, and S. Phanichphant Semiconducting metal oxides as sensors for environmentally hazardous gases Sensors and Actuators B 160 2011 580 591
9. G. Sberveglieri Recent developments in semiconducting thin film gas sensors Sensors and Actuators B 23 1995 103 109
10. J.C. Li, X.B. Jiang, and D.C. Ba Theoretical study of the gas sensitivity and response time of metal oxides thin films Thin Solid Films 520 2011 881 886
11. 2 sensor based on ZnO thin film Sensors and Actuators B 143 2009 99 102
12. J. Tamaki, Z. Zhang, K. Fujimori, M. Akiyama, T. Harada, N. Miura, and N. Yamazoe Grain size effects in tungsten oxide-based sensors for nitrogen oxides Journal of the Electrochemical Society 141 8 1994 2207 2210
13. K. Crowley, A. Morrin, A. Hernandez, E. O'Malley, P. Whitten, G. Wallace, M. Smyth, and A. Killard Fabrication of ammonia gas sensor using injet-printed polyniline nanoparticles Talanta 77 2008 710 717
14. N. Barsan, and U. Weimar Fundamentals of metal oxides gas sensors The 14th International Meeting on Chemical Sensors 2012 618 621
15. x ozone sensing films on flexible substrate Journal of Sensors 2009 1 5
16. A. Arena, N. Donato, G. Saitta, A. Bonavita, G. Rizzo, and G. Neri Flexible ethanol sensors on glossy paper substrates operating Sensors and Actuators B 145 2010 488 494
17. B. Hu, W. Chen, and J. Zhou High performance flexible sensor based on inorganic nanomaterials Sensors and Actuators B 176 2013 522 533
18. J. Lewis Material challenge for flexible organic devices Materials Today 9 4 2006 38 45
19. O.S. Kwon, E. Park, O. Young Kweon, S.J. Park, and J. Jang Novel flexible chemical gas sensor based on poly (3,4-ethylenedioxythiophene) nanotube membrane Talanta 82 2010 1338 1343
20. M. Tonezzer, and R.G. Lacerda Zinc oxide nanowires on carbon microfiber as flexible gas sensor Sensors and Actuators B 126 2007 573 578
21. M. Bendahan, P. Lauque, C. Lambert-Mauriat, H. Carchano, and J-L. Seguin Sputtered thin films of CuBr for ammonia microsensors: morphology, composition and ageing Sensors and Actuators B 84 2002 6 11 (Pubitemid 34532372)
22. 3 sensors fabricated by in situ self-assembly of polypyrrole Talanta 80 2009 763 769
23. P. Inkyu, H. Seung, P. Heng, P. Costa, P. Albert, J. Fréchet, E. Lee, and J. Jeong Nanoscale patterning and electronics on flexible substrate by direct nanoimprinting of metallic nanoparticles Advance Materials 20 2008 489 496
24. D. Karnakis, A. Kearsley, and M. Knowles Ultrafast laser patterning of OLEDs on flexible substrate for solid-state lighting Journal of Laser Micro Nanoengineering 4 2009 218 223
25. X. Yu, N. Zhou, S. Han, H. Liu, D. Buchholz, J. Yu, R. Chang, T. Marks, and A. Facchetti Flexible-spray coated TIPS-pentacene organic thin-film transistor as ammonia gas sensors Journal of Materials Chemistry C 2013 6532 6535
26. S.Y. Chu, W. Water, and J.T. Liaw Influence of postdeposition annealing on the properties of ZnO films prepared by RF magnetron sputtering Journal of the Ceramics Society 23 2003 1593 1598 (Pubitemid 36386653)
27. C.Y. Lin, J.G. Chen, C.W. Hu, J. Tunney, and K.C. Ho Using a PEDOT, PSS modified electrode for detecting nitric oxide gas Sensors and Actuators 140 2009 402 406
28. 2 gas sensors based on carbon nanotubes/reduced grapheme hybrid films Applied Physics Letters 96 2010 213105-1 213105-4
29. H. Ahn, J.H. Park, S.B. Kim, S.H. Jee, Y.S. Yoon, and D.J. Kim Vertically aligned ZnO nanorods sensor on flexible substrate Electrochemical and Solid-State Letters 3 11 2010 J125 J128
30. Information on: http://www.epa.gov/air/criteria.html.
31. J. McCarthy Ozone Air Quality Standards 2010 Congressional Research Service
32. Asch George, Les capteurs en instrumentation industrielle, DUNOD, Paris, 1991.
33. K. Khojier, H. Savaloni, and E. Amani Influence of annealing conditions on the crystallography structure, chemical composition and luminescence of ZnO thin films Applied Surface Science 289 2014 564 570
34. K. Grossmann, U. Weimar, and N. Barsan Semiconducting metal oxides based gas sensors Semiconductors and Semimetals 88 2013 261 280
35. A. Wei, L. Pan, and W. Huang Recent progress in the ZnO nanostructures-based sensors Materials Science and Engineering B 176 2011 1409 1421
36. A. Hattori, H. Tachibana, N. Yoshiike, and A. Yoshida Ozone sensor made by dip coating method Sensors and Actuators 77 1999 120 125 (Pubitemid 30505963)
37. M.C. Carotta, A. Cervi, A. Fioravanti, S. Gherardi, A. Giberti, B. Vendemiati, D. Vincenzi, and M. Sacerdoti A novel ozone detection at room temperature through UV-LED-assisted ZnO thick film sensors Thin Solid Film 520 2011 939 946
38. 3 based sensors selective to oxidizing gases Sensors and Actuators B 132 2008 209 215 (Pubitemid 351694421)
39. F.S.-S. Chien, C.R. Wang, Y.L. Chan, and H.L. Lin Fast response ozone sensor with ZnO nanorods grown by chemical vapor deposition Sensor and Actuators B 144 2010 120 125
40. N. Katsarakis, M. Bender, V. Cimalla, E. Gagaoudakis, and G. Kiriakidis Ozone sensing properties of DC sputtered, c-axis oriented ZnO films at room temperature Sensor and Actuators B 96 2003 76 81
41. G. Kenanakis, D. Vernardou, E. Kaoudoumas, G. Kiriakidis, and N. Katsarakis Ozone sensing properties of ZnO nanostructures grown by the aqueous chemical growth technique Sensor and Actuators B 124 2007 187 191 (Pubitemid 46754831)