Highly sensitive InOx ozone sensing films on flexible substrates

Journal of Sensors

Volumn 2009, Issue , 2009, Pages

  Kiriakidis, G ^a,b   Moschovis, K ^a,b   Kortidis, I ^b   Skarvelakis, R ^b  

^a UNIVERSITY OF CRETE   (Greece)

^b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

DC MAGNETRON SPUTTERING; ELECTRICAL CONDUCTIVITY; FLEXIBLE SUBSTRATE; MORPHOLOGY INVESTIGATIONS; OPTICAL TRANSPARENCY; ORDERS OF MAGNITUDE; OZONE CONCENTRATION; ULTRA-VIOLET LIGHT;

CHEMICAL SENSORS; OZONE; SURFACE DEFECTS; THIN FILMS;

SUBSTRATES;

EID: 68949135288     PISSN: 1687725X     EISSN: 16877268     Source Type: Journal    
DOI: 10.1155/2009/727893     Document Type: Article

References (20)

1. Oprea A., Brsan N., Weimar U., Courbat J., Briand D., de Rooij N. F., Integrated temperature, humidity and gas sensors on flexible substrates for low-power applications Proceedings of the 6th IEEE Sensors Conference October 2007 Atlanta, Ga, USA 158 161
2. Hao X., Ma J., Zhang D., Transparent conducting antimony-doped tin oxide films deposited on flexible substrates by r.f. magnetron-sputtering Applied Physics A 2002 75 3 397 399 (Pubitemid 34638577)
3. Sayhan I., Helwig A., Becker T., Discontinuously operated metal oxide gas sensors for flexible tag microlab applications IEEE Sensors Journal 2008 8 2 176 181
4. Briand D., Colin S., Courbat J., Raible S., Kappler J., de Rooij N. F., Integration of MOX gas sensors on polyimide hotplates Sensors and Actuators B 2008 130 1 430 435
5. Suchea M., Katsarakis N., Christoulakis S., Nikolopoulou S., Kiriakidis G., Low temperature indium oxide gas sensors Sensors and Actuators B 2006 118 1-2 135 141
6. Kiriakidis G., Moschovis K., Sadale S. B., Baraton M.-I., Systems and set-ups for effective sensing response applications Sensors for Environment, Health and Security: Advanced Materials and Technologies 2009 24 New York, NY, USA Springer 159 178
7. Ippolito S. J., Kandasamy S., Kalantar-zadeh K., Highly sensitive layered ZnO/ LiNbO3 SAW device with InOx selective layer for NO2 and H2 gas sensing Sensors and Actuators B 2005 111-112 207 212
8. U.S. Food and Drug Administration, Federal Register 1997 62 74 18937 18964
9. USA EPA NAAQS directory,. March 2008
10. Canadas Clean Air Act and Canadian Environmental Protection Act (CEPA)
11. Kiriakidis G., Bender M., Katsarakis N., Ozone sensing properties of polycrystalline indium oxide films at room temperature Physica Status Solidi A 2001 185 1 27 32
12. Xirouchaki C., Kiriakidis G., Pedersen T. F., Fritzsche H., Photoreduction and oxidation of as-deposited microcrystalline indium oxide Journal of Applied Physics 1996 79 12 9349 9352
13. Mabrook M. F., Pearson C., Petty M. C., Inkjet-printed polypyrrole thin films for vapour sensing Sensors and Actuators B 2006 115 1 547 551
14. Korotcenkov G., Blinov I., Ivanov M., Stetter J. R., Ozone sensors on the base of SnO2 films deposited by spray pyrolysis Sensors and Actuators B 2007 120 2 679 686
15. Kiriakidis G., Suchea M., Christoulakis S., Katsarakis N., High performance gas sensing materials based on nanostructed metal oxide films Reviews on Advanced Materials Science 2005 10 3 215 223
16. Kiriakidis G., uchea M., Christoulakis S., Moschovis K., Kitsopoulos T., Stoemenos J., Nano-structural and surface characteristics of non-stoichiometric In2O3-x thin films International Journal of Nanotechnology 2009 6 1-2 208 218. Guest Editors: A. G. Nassiopoulou and C. Fotakis
17. Barsan N., Weimar U., Conduction model of metal oxide gas sensors Journal of Electroceramics 2001 7 3 143 167
18. Mishra S., Ghanshyam C., Ram N., Bajpai R. P., Bedi R. K., Detection mechanism of metal oxide gas sensor under UV radiation Sensors and Actuators B 2004 97 2-3 387 390
19. Kuzmych O., Allen B. L., Star A., Carbon nanotube sensors for exhaled breath components Nanotechnology 2007 18 37 7
20. Abad E., Mazzolai B., Juarros A., Investigation of fabrication and encapsulation processes for a flexible tag microlab Microsystem Technologies 2008 14 4-5 527 534