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Journal of Power Sources

Volumn 269, Issue , 2014, Pages 520-525

Plasma enhanced chemical vapor deposition silicon nitride for a high-performance lithium ion battery anode

(6) Yang, Jinho a De Guzman, Rhet C a Salley, Steven O a Ng, K Y Simon a Chen, Bing Hung b Cheng, Mark Ming Cheng a

a Wayne State University (United States)

b NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

Composite anode; Lithium ion battery; Silicon anode; Silicon nitride

Indexed keywords

ANODES; IONS; LITHIUM COMPOUNDS; LITHIUM-ION BATTERIES; NITRIDES; PLASMA CVD; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON BATTERIES; SILICON NITRIDE; THIN FILM LITHIUM ION BATTERIES; THIN FILMS;

COMPOSITE ANODES; HIGH REVERSIBLE CAPACITIES; HIGH-PERFORMANCE LITHIUM-ION BATTERIES; LITHIUM-ION BATTERY ANODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS (PE CVD); SEMICONDUCTOR INDUSTRY; SILICON ANODE; SILICON NITRIDE THIN FILMS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 84904971885 PISSN: 03787753 EISSN: None Source Type: Journal
DOI: 10.1016/j.jpowsour.2014.06.135 Document Type: Article

Times cited : (43)

References (32)

1
- 2342577530
- M.N. Obrovac, and L. Christensen Electrochem. Solid State Lett. 7 2004 A93 A96
- (2004) Electrochem. Solid State Lett. , vol.7
- Obrovac, M.N.¹ Christensen, L.²

2
- 33846261643
- M.N. Obrovac, and L.J. Krause J. Electrochem. Soc. 154 2007 A103 A108
- (2007) J. Electrochem. Soc. , vol.154
- Obrovac, M.N.¹ Krause, L.J.²

3
- 0036903255
- J. Yang, Y. Takeda, N. Imanishi, C. Capiglia, J.Y. Xie, and O. Yamamoto Solid State Ionics 152 2002 125 129
- (2002) Solid State Ionics , vol.152 , pp. 125-129
- Yang, J.¹ Takeda, Y.² Imanishi, N.³ Capiglia, C.⁴ Xie, J.Y.⁵ Yamamoto, O.⁶

4
- 78650828671
- J.R. Szczech, and S. Jin Energy Environ. Sci. 4 2011 56 72
- (2011) Energy Environ. Sci. , vol.4 , pp. 56-72
- Szczech, J.R.¹ Jin, S.²

5
- 33646443647
- J.P. Maranchi, A.F. Hepp, A.G. Evans, N.T. Nuhfer, and P.N. Kumta J. Electrochem. Soc. 153 2006 A1246 A1253
- (2006) J. Electrochem. Soc. , vol.153
- Maranchi, J.P.¹ Hepp, A.F.² Evans, A.G.³ Nuhfer, N.T.⁴ Kumta, P.N.⁵

6
- 0038686005
- P. Limthongkul, Y.I. Jang, N.J. Dudney, and Y.M. Chiang J. Power Sources 119 2003 604 609
- (2003) J. Power Sources , vol.119 , pp. 604-609
- Limthongkul, P.¹ Jang, Y.I.² Dudney, N.J.³ Chiang, Y.M.⁴

7
- 0029250585
- A.M. Wilson, and J.R. Dahn J. Electrochem. Soc. 142 1995 326 332
- (1995) J. Electrochem. Soc. , vol.142 , pp. 326-332
- Wilson, A.M.¹ Dahn, J.R.²

8
- 24944586370
- K. Hanai, Y. Liu, N. Imanishi, A. Hirano, M. Matsumura, T. Ichikawa, and Y. Takeda J. Power Sources 146 2005 156 160
- (2005) J. Power Sources , vol.146 , pp. 156-160
- Hanai, K.¹ Liu, Y.² Imanishi, N.³ Hirano, A.⁴ Matsumura, M.⁵ Ichikawa, T.⁶ Takeda, Y.⁷

9
- 27644545392
- M. Miyachi, H. Yamamoto, H. Kawai, T. Ohta, and M. Shirakata J. Electrochem. Soc. 152 2005 A2089 A2091
- (2005) J. Electrochem. Soc. , vol.152
- Miyachi, M.¹ Yamamoto, H.² Kawai, H.³ Ohta, T.⁴ Shirakata, M.⁵

10
- 84886099369
- H. Takezawa, K. Iwamoto, S. Ito, and H. Yoshizawa J. Power Sources 244 2013 149 157
- (2013) J. Power Sources , vol.244 , pp. 149-157
- Takezawa, H.¹ Iwamoto, K.² Ito, S.³ Yoshizawa, H.⁴

11
- 51249110846
- D. Ahn, C. Kim, J.G. Lee, and B. Park J. Solid State Chem. 181 2008 2139 2142
- (2008) J. Solid State Chem. , vol.181 , pp. 2139-2142
- Ahn, D.¹ Kim, C.² Lee, J.G.³ Park, B.⁴

12
- 84872804937
- N. Suzuki, R.B. Cervera, T. Ohnishi, and K. Takada J. Power Sources 231 2013 186 189
- (2013) J. Power Sources , vol.231 , pp. 186-189
- Suzuki, N.¹ Cervera, R.B.² Ohnishi, T.³ Takada, K.⁴

13
- 0036145898
- M.I. Alayo, I. Pereyra, W.L. Scopel, and M.C.A. Fantini Thin Solid Films 402 2002 154 161
- (2002) Thin Solid Films , vol.402 , pp. 154-161
- Alayo, M.I.¹ Pereyra, I.² Scopel, W.L.³ Fantini, M.C.A.⁴

14
- 0037769611
- R.W. Collins, A.S. Ferlauto, G.M. Ferreira, C. Chen, J. Koh, R.J. Koval, Y. Lee, J.M. Pearce, and C.R. Wronski Sol. Energy Mater. Sol. Cells 78 2003 143 180
- (2003) Sol. Energy Mater. Sol. Cells , vol.78 , pp. 143-180
- Collins, R.W.¹ Ferlauto, A.S.² Ferreira, G.M.³ Chen, C.⁴ Koh, J.⁵ Koval, R.J.⁶ Lee, Y.⁷ Pearce, J.M.⁸ Wronski, C.R.⁹

15
- 0033185352
- S. Bourderau, T. Brousse, and D.M. Schleich J. Power Sources 81 1999 233 236
- (1999) J. Power Sources , vol.81 , pp. 233-236
- Bourderau, S.¹ Brousse, T.² Schleich, D.M.³

16
- 0037430915
- H.J. Jung, M. Park, Y.G. Yoon, G.B. Kim, and S.K. Joo J. Power Sources 115 2003 346 351
- (2003) J. Power Sources , vol.115 , pp. 346-351
- Jung, H.J.¹ Park, M.² Yoon, Y.G.³ Kim, G.B.⁴ Joo, S.K.⁵

17
- 1842666633
- T. Takamura, S. Ohara, M. Uehara, J. Suzuki, and K. Sekine J. Power Sources 129 2004 96 100
- (2004) J. Power Sources , vol.129 , pp. 96-100
- Takamura, T.¹ Ohara, S.² Uehara, M.³ Suzuki, J.⁴ Sekine, K.⁵

18
- 33947722666
- V. Baranchugov, E. Markevich, E. Pollak, G. Salitra, and D. Aurbach Electrochem. Commun. 9 2007 796 800
- (2007) Electrochem. Commun. , vol.9 , pp. 796-800
- Baranchugov, V.¹ Markevich, E.² Pollak, E.³ Salitra, G.⁴ Aurbach, D.⁵

19
- 33846233468
- T.L. Kulova, A.M. Skundin, Y.V. Pleskov, E.I. Terukov, and O.I. Kon'kov J. Electroanal. Chem. 600 2007 217 225
- (2007) J. Electroanal. Chem. , vol.600 , pp. 217-225
- Kulova, T.L.¹ Skundin, A.M.² Pleskov, Y.V.³ Terukov, E.I.⁴ Kon'Kov, O.I.⁵

20
- 79954431248
- J.J. Nguyen, K. Evanoff, and W.J. Ready Thin Solid Films 519 2011 4144 4147
- (2011) Thin Solid Films , vol.519 , pp. 4144-4147
- Nguyen, J.J.¹ Evanoff, K.² Ready, W.J.³

21
- 84871729964
- M.W. Forney, R.A. DiLeo, A. Raisanen, M.J. Ganter, J.W. Staub, R.E. Rogers, R.D. Ridgley, and B.J. Landi J. Power Sources 228 2013 270 280
- (2013) J. Power Sources , vol.228 , pp. 270-280
- Forney, M.W.¹ Dileo, R.A.² Raisanen, A.³ Ganter, M.J.⁴ Staub, J.W.⁵ Rogers, R.E.⁶ Ridgley, R.D.⁷ Landi, B.J.⁸

22
- 77952241859
- S.O. Kim, H.T. Shim, and J.K. Lee J. Solid State Electrochem. 14 2010 1247 1253
- (2010) J. Solid State Electrochem. , vol.14 , pp. 1247-1253
- Kim, S.O.¹ Shim, H.T.² Lee, J.K.³

23
- 0032499862
- M. Winter, J.O. Besenhard, M.E. Spahr, and P. Novak Adv. Mater. 10 1998 725 763
- (1998) Adv. Mater. , vol.10 , pp. 725-763
- Winter, M.¹ Besenhard, J.O.² Spahr, M.E.³ Novak, P.⁴

24
- 2942642549
- T.D. Hatchard, and J.R. Dahn J. Electrochem. Soc. 151 2004 A838 A842
- (2004) J. Electrochem. Soc. , vol.151
- Hatchard, T.D.¹ Dahn, J.R.²

25
- 0037732647
- A. Netz, R.A. Huggins, and W. Weppner J. Power Sources 119 2003 95 100
- (2003) J. Power Sources , vol.119 , pp. 95-100
- Netz, A.¹ Huggins, R.A.² Weppner, W.³

26
- 36749108492
- U.V. Alpen, A. Rabenau, and G.H. Talat Appl. Phys. Lett. 30 1977 621 623
- (1977) Appl. Phys. Lett. , vol.30 , pp. 621-623
- Alpen, U.V.¹ Rabenau, A.² Talat, G.H.³

27
- 78649378381
- W. Li, G.T. Wu, C.M. Araujo, R.H. Scheicher, A. Blomqvist, R. Ahuja, Z.T. Xiong, Y.P. Feng, and P. Chen Energy Environ. Sci. 3 2010 1524 1530
- (2010) Energy Environ. Sci. , vol.3 , pp. 1524-1530
- Li, W.¹ Wu, G.T.² Araujo, C.M.³ Scheicher, R.H.⁴ Blomqvist, A.⁵ Ahuja, R.⁶ Xiong, Z.T.⁷ Feng, Y.P.⁸ Chen, P.⁹

28
- 84905057732
- J.H. Souk, G.N. Parsons, and J. Batey Amorph. Silicon Technol. 219 1991 787 792
- (1991) Amorph. Silicon Technol. , vol.219 , pp. 787-792
- Souk, J.H.¹ Parsons, G.N.² Batey, J.³

29
- 0037698261
- L. Wang, H.S. Reehal, F.L. Martinez, E.S. Andres, and A. del Prado Semicond. Sci. Technol. 18 2003 633 641
- (2003) Semicond. Sci. Technol. , vol.18 , pp. 633-641
- Wang, L.¹ Reehal, H.S.² Martinez, F.L.³ Andres, E.S.⁴ Del Prado, A.⁵

30
- 24944471845
- M. Yoshio, T. Tsumura, and N. Dimov J. Power Sources 146 2005 10 14
- (2005) J. Power Sources , vol.146 , pp. 10-14
- Yoshio, M.¹ Tsumura, T.² Dimov, N.³

31
- 0037255492
- S.W. Song, K.A. Striebel, R.P. Reade, G.A. Roberts, and E.J. Cairns J. Electrochem. Soc. 150 2003 A121 A127
- (2003) J. Electrochem. Soc. , vol.150
- Song, S.W.¹ Striebel, K.A.² Reade, R.P.³ Roberts, G.A.⁴ Cairns, E.J.⁵

32
- 77952344844
- J. Cho J. Mater. Chem. 20 2010 4009 4014
- (2010) J. Mater. Chem. , vol.20 , pp. 4009-4014
- Cho, J.¹

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