Thermal conductivity of silicon nanomeshes: Effects of porosity and roughness

Journal of Applied Physics

Volumn 115, Issue 20, 2014, Pages

  Wolf, Stefanie ^a   Neophytou, Neophytos ^b   Kosina, Hans ^a  

^a INSTITUTE FOR MICROELECTRONICS   (Austria)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MONTE CARLO METHODS; POROSITY; SILICON; SURFACE ROUGHNESS;

BOUNDARY ROUGHNESS; EFFECTS OF MATERIALS; NANOMESH; PHONON TRANSPORT; ROOM TEMPERATURE; SILICON MEMBRANES; THERMAL TRANSPORT; TRANSPORT DIRECTION;

THERMAL CONDUCTIVITY;

EID: 84901989610     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.4879242     Document Type: Article

References (34)

1. J.-K. Yu, S. Mitrovic, D. Tham, J. Varghese, and J. R. Heath, "Reduction of thermal conductivity in phononic nanomesh structures,"Nat. Nanotechnol. 5 (10), 718-721 (2010). 10.1038/nnano.2010. 149
2. J. Tang, H.-T. Wang, D. H. Lee, M. Fardy, Z. Huo, T. P. Russell, and P. Yang, "Holey silicon as an efficient thermoelectric material,"Nano Lett. 10 (10), 4279-4283 (2010). 10.1021/nl102931z
3. P. E. Hopkins, C. M. Reinke, M. F. Su, R. H. Olsson III, E. A. Shaner, Z. C. Leseman, J. R. Serrano, L. M. Phinney, and I. E. Kady, "Reduction in the thermal conductivity of single crystalline silicon by phononic crystal patterning,"Nano Lett. 11 (1), 107-112 (2011). 10.1021/nl102918q
4. A. Wolf and R. Brendel, "Thermal conductivity of sintered porous silicon films,"This Solid Films 513, 385 (2006). 10.1016/j.tsf.2006.01.073
5. A. I. Boukai, Y. Bunimovich, J. Tahir-Kheli, J. K. Yu, W. A. Goddard, and J. R. Heath, "Silicon nanowires as efficient thermoelectric materials,"Nature 451 (7175), 168-171 (2008). 10.1038/nature06458
6. A. I. Hochbaum, R. Chen, R. D. Delgado, W. Liang, E. C. Garnett, M. Najarian, A. Majumdar, and P. Yang, "Enhanced thermoelectric performance of rough silicon nanowires,"Nature 451, 163-167 (2008). 10.1038/nature06381
7. K. Nielsch, J. Bachmann, J. Kimling, and H. Bottner, "Thermoelectric nanostructures: From physical model systems towards nanograined composites,"Adv. Energy Mater. 1, 713-731 (2011). 10.1002/aenm.201100207
8. J.-H. Lee, G. Galli, and J. C. Grossman, "Nanoporous Si as an efficient thermoelectric material,"Nano Lett. 8 (11), 3750-3754 (2008). 10.1021/nl802045f
9. S. P. Hepplestone and G. P. Srivastava, "Lattice dynamics and thermal properties of phononic semiconductors,"Phys. Rev. B 84, 115326 (2011). 10.1103/PhysRevB.84.115326
10. C. Bera, N. Mingo, and S. Volz, "Marked effects of alloying on the thermal conductivity of nanoporous materials,"Phys. Rev. Lett. 104, 115502 (2010). 10.1103/PhysRevLett.104.115502
11. R. Prasher, "Transverse thermal conductivity of porous materials made from aligned nano- and microcylindrical pores,"J. Appl. Phys. 100, 064302 (2006). 10.1063/1.2337786
12. Q. Hao, G. Chen, and M. S. Jeng, "Frequency-dependent Monte Carlo simulations of phonon transport in two-dimensional porous silicon with aligned pores,"J. Appl. Phys. 106 (11), 114321 (2009). 10.1063/1.3266169
13. J. D. Chung and M. Kaviany, "Effects of phonon pore scattering and pore randomness on effective conductivity of porous silicon,"Int. J. Heat Mass Transfer 43 (4), 521-538 (2000). 10.1016/S0017-9310(99)00165-9
14. K. Miyazaki, T. Arashi, D. Makino, and H. Tsukamoto, "Heat conduction in microstructured materials,"IEEE Trans. Compon. Packag. Technol. 29 (2), 247-253 (2006). 10.1109/TCAPT.2006.875905
15. R. H. Tarkhanyana and D. G. Niarchos, "Reduction in lattice thermal conductivity of porous materials due to inhomogeneous porosity,"Int. J. Thermal Sci. 67, 107-112 (2013). 10.1016/j.ijthermalsci.2012.12.008
16. D. Lacroix, K. Joulain, and D. Lemonnier, "Monte Carlo transient phonon transport in silicon and germanium at nanoscales,"Phys. Rev. B 72, 064305 (2005). 10.1103/PhysRevB.72.064305
17. S. Mazumder and A. Majumdar, "Monte Carlo study of phonon transport in solid thin films including dispersion and polarization,"J. Heat Transfer 123, 749 (2001). 10.1115/1.1377018
18. Z. Aksamija and I. Knezevic, "Anisotropy and boundary scattering in the lattice thermal conductivity of silicon nanomembranes,"Phys. Rev. B 82, 045319 (2010). 10.1103/PhysRevB.82.045319
19. Y. Chen, D. Li, J. R. Lukes, and A. Majumdar, "Monte Carlo simulation of silicon nanowire thermal conductivity,"J. Heat Transfer 127, 1129 (2005). 10.1115/1.2035114
20. D. Lacroix, K. Joulain, D. Terris, and D. Lemonnier, "Monte Carlo simulation of phonon confinement in silicon nanostructures: Application to the determination of the thermal conductivity of silicon nanowires,"Appl. Phys. Lett. 89 (10), 103104 (2006). 10.1063/1.2345598
21. J. Randrianalisoa and D. Baillis, "Monte Carlo simulation of steady-state microscale phonon heat transport,"J. Heat Transfer 130 (7), 072404 (2008). 10.1115/1.2897925
22. E. B. Ramayya, L. N. Maurer, A. H. Davoody, and I. Knezevic, "Thermoelectric properties of ultrathin silicon nanowires,"Phys. Rev. B 86, 115328 (2012). 10.1103/PhysRevB.86.115328
23. M.-S. Jeng, D. Song, G. Chen, and R. Yang, "Modeling the thermal conductivity and phonon transport in nanoparticle composites using Monte Carlo simulation,"J. Heat Transfer 130 (4), 042410 (2008). 10.1115/1.2818765
24. A. McGaughey and A. Jain, "Nanostructure thermal conductivity prediction by Monte Carlo sampling of phonon free paths,"Appl. Phys. Lett. 100, 061911 (2012). 10.1063/1.3683539
25. See http://www.globaltcad.com/en/home.html.
26. E. Pop, R. W. Dutton, and K. E. Goodson, "Analytic band Monte Carlo model for electron transport in Si including acoustic and optical phonon dispersion,"J. Appl. Phys. 96, 4998 (2004). 10.1063/1.1788838
27. R. Prasher, T. Tong, and A. Majumdar, "Approximate analytical models for phonon specific heat and ballistic thermal conductance of nanowires,"Nano Lett. 8, 99 (2008). 10.1021/nl0721665
28. H. Karamitaheri, N. Neophytou, M. K. Taheri, R. Faez, and H. Kosina, "Calculation of confined phonon spectrum in narrow silicon nanowires using the valence force field method,"J. Electron. Mater. 42 (7), 2091-2097 (2013). 10.1007/s11664-013-2533-z
29. M. G. Holland, "Analysis of lattice thermal conductivity,"Phys. Rev. 132 (6), 2461-2471 (1963). 10.1103/PhysRev.132.2461
30. R. Peterson, "Direct simulation of phonon-mediated heat transfer in a debye crystal,"J. Heat Transfer 116, 815 (1994). 10.1115/1.2911452
31. x nanocomposites,"Phys. Rev. Lett. 112, 065901 (2014). 10.1103/PhysRevLett.112.065901
32. y superlattices: Competition between interfacial and internal scattering,"Phys. Rev. B 88, 155318 (2013). 10.1103/PhysRevB.88.155318
33. C. Jeong, S. Datta, and M. Lundstrom, "Thermal conductivity of bulk and thin-film silicon: A Landauer approach,"J. Appl. Phys. 111, 093708 (2012). 10.1063/1.4710993
34. H. Karamitaheri, N. Neophytou, and H. Kosina, "Anomalous diameter dependence of thermal transport in ultra-narrow Si nanowires,"J. Appl. Phys. 115, 024302 (2014). 10.1063/1.4858375